PVD Txheej Txheem 1.1

Cov khoom yuav tsum tau muab pov thawj ua ntej. Cov txheej txheem kev tu nws txawv nyob ntawm seb nws zoo npaum li cas los ntawm lub tshuab electroplater, cov ntaub ntawv substrate thiab geometry. Cov khoom yog thauj khoom mus rau hauv lub tshuab nqus tsev rau ntawm cov khoom siv rau kev tsim kho kom zoo dua rau cov phaw chamber thiab qhov muaj kev tiv thaiv cov txheej txheem.

Lub tshuab nqus tsev vacuum evacuated rau 10-6 torr (siab nqus) kom tshem tawm cov kab mob hauv lub cev. Lub tshuab nqus tsev vacuum backfilled nrog ib cov pa argon thiab ionized, ua rau muaj kev tawm hauv cov xim (plasma). Qhov no yog qhov ua kom lub tsev tu kom huv thiab npaj cov khoom rau thawj cov hlau tso tawm.