Daim ntawv thov ntawm hluav taws xob nqaj hluav taws xob

Daim ntawv thov ntawm electron nqaj evaporation - kev npaj ntawm TiO 2 zaj duab xis los ntawm electron nqaj evaporation

Txheej txheem cov txheej txheem hluav taws xob nqaj hlau electron nqaj evaporation los npaj TiO 2 zaj duab xis, siv INTEGRITY-39 automatic kho qhov muag txheej tshuab nrog ion beam tau pab rau cov nqaj hlau hluav taws xob evaporation raws li pom hauv daim duab hauv qab no.

0010010 nbsp; 1. Cov dej ua kom dej txias; {{2}}. Dej tso pa tawm thoob dej; 3. Qhuas; 4. Beam kauj; 5. Hluav taws xob cov kab hluav taws xob kis; 6. Cov cua sov teeb; 7. Substrate thav duab; 8. Lub tshuab muaj zog; 9. Soj ntsuam zaj duab xis; 1 0. Qhov ua haujlwm voltage ntawm tus qauv hluav taws xob phom npaj los ntawm ion qhov chaw plating yog 1 0 kV, qhov tam sim no yog {{2}} 00 A, thiab qhov ntsuas qhov kub ntawm lub tshuab nqus tsev yog 1 45 ~ {1 55 ℃. Dub granular Ti 2 O 3 nrog qhov huv huv ntawm 9 9.. 99% tau xaiv rau cov khoom siv membrane. Cc - 1 05 txias cathode ion nqaj tau siv rau kev pabcuam xa tawm. Thaum tso nyiaj, lub tshuab nqus tsev tau muaj O 2 nrog qhov huv huv ntawm 9 9.. 99% raws li cov pa roj tawm. Ua ntej txheej, lub substrate yog ntxuav nrog iav tov, rinsed nrog deionized 0010010 nbsp; dej, thiab tshuab-qhuav nrog nitrogen. Tom qab ntawd, lub substrate yog ntxuav nrog 99. 9% acetone thiab anhydrous ethanol ultrasonic yoj rau 15 min txhua. Tom qab ziab nrog daim ntawv so tshwj xeeb, nws tau thauj khoom rau hauv chav nqus tsev. Thaum lub tshuab nqus tsev mus rau {{5}}. Thaum lub substrate yog rhuab mus rau qhov chaw tso tshav kub ntawm 1 5 0 ℃, cov khoom siv ion pib ua rau pob zeb tawg, thiab lub zog yog tswj ntawm {{5}} 0 ~ 9 0 eV rau 10 min.

tom qab ntawd, lub phom hluav taws xob tau pib ua kom kub thiab yaj ntawm zaj duab xis cov khoom, thiab qhov tso nyiaj yog 0. 38 ~ 0. 42 nm / s. Thaum cov yeeb yaj kiab tau muab tso rau qhov tsim tsim tuab ntawm 440 nm, qhov kev zov me nyuam kaw lub phom hluav taws xob, thiab lub plating tiav. Tom qab pleev xim, lub tshuab nqus tsev tau lawm txias rau chav sov thiab cov qauv tau coj tawm. Spectral kuaj ntawm cov qauv TiO 2 tau ua nrog Lambda 900 (ntsuas qhov ntsuas 175 ~ 3 300 nm) spectrophotometer. Cov tuab tuab, kev faib tawm qhov muaj coefficient thiab qhov ntsuas qhov ntsuas ntawm TiO 2 zaj duab xis tau suav los ntawm Macleod software lub hnab ntawv txoj kev. Qhov cuam tshuam ntawm cov nqus sib txawv ntawm cov yeeb yaj kiab tsim cov kev tsim nyogy, qhov ntsuas rov ua kom pom zoo thiab nqus coefficient ntawm TiO 2 tau kawm nrog cov sib txawv ntawm cov pa muaj qhov siab ntshiab mus rau hauv lub tshuab nqus tsev. Thaum TiO 2 nyias zaj duab xis yog tso los ntawm kev tso cua sov pab los ntawm ion qhov chaw ntawm qhov siab nqus, qhov hloov ntawm nqus tsev kawm ntawv nrog cov kis ntawm oxygen tau teev rau hauv qab no. Raws li cov pa oxygen hauv lub tshuab nqus tsev yog ionized rau hauv oxygen ions thiab hnov ​​mob nrog Ti {{{2}} O 3 vapor molecules tag nrho, cov pa poob rau hauv kev rhuav tshem ntawm Ti {{{{{4} }}} O 3 tau hloov kho, thiab qhov TiO 2 hauv zaj duab xis kuj yog ntshiab. Txawm li cas los xij, yog tias cov pa xa tawm tsis txaus lossis cov tshuaj tiv thaiv ntawm Ti {{{2}} O 3 thiab O 2 tsis txaus, lub siab-nqus titanium oxide zaj duab xis tino {{{{ 4}}}} n - 1 (n=1, {{2}}, ..., 1 0). Nrog qhov nce ntawm oxygen oxygen sib nrawm, qhov kev sib tsoo yuav tshwm sim ntawm TiO 2 vapor molecules thiab oxygen molecules hauv cov txheej txheem ntawm evaporation nce nce thiab lub zog ploj, uas txo cov kev tua lub zog ntawm TiO 2 tso rau ntawm lub substrate saum npoo thiab muaj feem xyuam rau kev nplaum thiab densification ntawm zaj duab xis tso. Rau qhov kho qhov muag nyias zaj duab xis, ion qhov chaw pabcuam tuaj yeem ua rau lub zog ua tiav lub zog ntawm cov lwg me me nyob rau sab qaum deg, tsis tsuas yog muaj qhov cuam tshuam loj ntawm qhov ntsuas tsis zoo ntawm zaj duab xis, tab sis kuj tuaj yeem txhim kho zaj duab xis ntom thiab noo noo tsis kam, thiab zaj duab xis kev nplaum rau ntawm cov txheej nruab zog kuj tseem cuam tshuam tau zoo.

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