Kev Tshaj Tawm Ntawm Magnetron Cathode Sputtering Target
Jun 08, 2018| Magnetron pluttering lub hom phiaj yog lub tshuab nqus hlau cov cav tov, thiab tseem muaj hluav taws xob hluav taws xob. Los ntawm cov kev xav ntawm kev siv lub hom phiaj fais fab, peb muaj kev txhawj xeeb ntxiv txog nws txoj kev ua hluav taws xob.
1. Raws li cov neeg kho tshuab
Raws li cov qauv kev lag luam thiab cov hom phiaj, magnetron sputtering lub hom phiaj tau raug muab faib rau hauv lub dav hlau (rectangular or circular) magnetron lub hom phaj, coaxial coercive magnetron lub hom phaj, lub nplhaib zoo li lub ntsiab lus ntawm conical magnetron (S gun) thiab ntau lwm tus.
2. Raws li cov phiaj xwm phiaj xwm phiaj xwm
Lub hom phiaj ntawm kev npaj yuav muab faib ua hom phiaj rau daim phiaj zeem plaub ntug, phiajcim phiajcim phiajcim, thiab arc-magnetron dual-purpose composite planar target.
3. Raws li daim teb magnetic
(1) Cov phiaj xwm Magnetron tuaj yeem raug faib ua cov hlau nplaum thiab cov electromagnets nyob ntawm seb qhov kev ua tiav ntawm qhov sib txawv ntawm qhov chaw.
(2) Raws li qhov sib txawv ntawm qhov kev npaj thiab kev faib tawm ntawm lub phiaj xwm magnetron hauv lub tshuab nqus tsev vacuum thiab qhov sib txawv ntawm kev sib faib ntawm cov hlau nplaum thiab sib nqus kab, nws yuav muab faib ua cov magnetron pluttering thiab unbalanced magnetron sputtering (unbalanced magnetron sputtering yuav ua rau cov ntshav ploj mus kom deb ntawm lub phiaj ntim ua kom zoo dua qub thiab qhov chaw loj ntawm thaj tsam ntawm qhov chaw ua hauj lwm zoo. Cov phiaj ntau qhov chaw tua hlau nplaum tsis muaj kab mob magnetron sputtering system tuaj yeem ua kom muaj cov dej siab thiab cov yeeb yaj kiab zoo dua .
(3) Cov pob zeb uas tsis muaj kev sib dhos ntawm cov hlau nplaum magnetron txav tau tsis tau tsuas yog los ntawm kev hloov qhov loj thiab lub zog ntawm cov hlau nplaum sab hauv thiab sab nraud, tab sis kuj los ntawm ob pawg ntawm electromagnetic coils, los yog siv cov qauv sib xyaw ntawm electromagnetic coils thiab kev ruaj khov hlau nplaum, thiab tseem ntxiv cov solenoids ntxiv ntawm cov cathode thiab cov substrate hloov lub magnetic teb ntawm cathode thiab cov substrate thiab tswj qhov piv ntawm zoo ions thiab cov atom hauv lub deposition kom zoo tshaj.