Kev loj hlob ntawm cov ntaub ntawv tshiab rau cov coatings tawv txiav cov cuab yeej

Kev loj hlob ntawm cov ntaub ntawv tshiab rau cov coatings tawv txiav cov cuab yeej

IKS PVD, Cov cuab yeej PVD lub tshuab nqus tsev tshuab, hu rau peb tam sim no, iks.pvd@foxmail.com

1. Kev loj hlob ntawm cov ntaub ntawv ntau txheej txheem thiab sib xyaw xim

PVD tshuab vim nws txoj kev ntsuas kub hauv qab 500 ℃ , tuaj yeem siv raws li txoj kev kho mob kawg, tsim kom muaj txheej txheem ceev cov cuab yeej hlau, zoo heev txhim kho kev ua haujlwm ntawm kev kub ceev steel cutter, yog li siv tshuab los ntawm 1980 Thaum kawg ntawm xyoo 1980, lub PVD txheej txheem ntawm HSS txoj kev txiav cov cuab yeej hauv kev tsim tau tshaj li ntawm 60% .Txheej pib xyoo pua 21st, lub PVD txheej txheem ntawm HSS cutters hauv kev tsim tau lub teb chaws tuaj txog 50% ~ 70 %, thiab lub PVD txheej txheej ntawm HSS nyuaj cutters mus txog li 90% .Piv daim ntaub ntawv zoo ntawm PVD technology hauv cheeb tsam ntawm high-speed steel cov cuab yeej tau attracted zoo ntawm cov kev lag luam thoob plaws ntiaj teb. Thaum sib tw los tsim kev ua tau zoo thiab muaj kev tiv thaiv zoo siab, daim teb daim ntawv pov thawj ntawm PVD tau nthuav dav dav (tshwj xeeb tshaj yog nyob rau hauv daim ntawv thov cemented carbide thiab cov cuab yeej siv kabmob) .Txoj kev pom tau hais tias piv nrog cov txheej txheem CVD, nyob rau hauv 600 ℃ twb tsis ntxim rau cov dabtsi yog khoov lub zog ntawm cov khoom siv cuab yeej.Tus sab hauv lub xeev kev nyuab siab yog cov kev xav, kab nrog txoj kev loj hlob ntawm ntsuab kev lag luam.Thaum xyoo 1990, PVD tshuab tau siv ntau txoj hauv kev kho cov dej khov kho milling, tho ntsis, cov qhov dej ntawm qhov dej, cov cuab yeej nqus, cov khoom siv, lwm yam zoo li

Lub German Eurasia noj kev lag luam muaj analyzed lub cuab tam txheej muag nyob rau hauv Suav teb nyob rau hauv 1999.Qhov kev lag luam loj ntawm tuam txheej nyob rau hauv Suav nyob rau xyoo 1999 yog 75.12 lab yuan.According rau kev lag luam ntawm kev lag luam machinery suav yearbook (tau yog ib tug tswv cuab ntawm lub cuab tam cov cuab yeej) high-speed steel tuam khoom nyob rau hauv Suav teb tau tshaj tawm rau feem ntau cov qoob loo, nws cov khoom tso zis muaj account rau 85.9%, muag account rau 89.8%, thiab tib lub xyoo coating cuab tam rau tsuas yog 3% ~ 4%. txheej kev lag luam yuav loj hlob los ntawm ntau tshaj 20 feem pua ntawm txhua xyoo, thiab cov cuab yeej cuab tam PVD tuam tsev yuav loj hlob tuaj, thiab qhov loj ntawm Suav lub lag luam kev lag luam yuav tsum tau ua kom tiav 247.69 lab nyiaj los ntawm 2005. Vim tias lub Tuam Tshoj txoj kev lag luam kev lag luam yog loj heev, li ntawd, txoj kev loj hlob ntawm cov cuab tam txheej txheem yog qhov tseem ceeb heev.Txawm tias lub cuab tam siv tam sim no lub tshuab txheej txheem thiab thoob ntiaj teb advanced qib piv rau qhov kev sib txawv loj, qhov qub TIALN txheej tec hnfor tsis mature, tab sis qhov kev ua lag luam loj loj thiab lub teb chaws nce ceev cov cai rau innovation, ntsuab tsim tshuab, tau txhawb cov kev tsim tshiab ntawm cov cuab yeej siv hluav taws xob.

Tej cuab yeej nto ntawm cov yeeb yaj kiab ntawm cov khoom siv uas yuav tsum muaj: 1, kev kub ntxhov, kev coj ua zoo; 2. Khaws tshuaj khov tshuaj, tsis muaj tshuaj lom neeg nrog cov khoom ua haujlwm; 3, tshav kub thiab oxidation ua hauj, tsis txhuam coefficient, thiab matrix adhesion firm. Nws tsis yooj yim rau cov khoom siv tib txheej kom tau raws li tag nrho cov kev cai saum toj saud. Kev loj hlob ntawm cov ntaub ntawv, nws yog los ntawm tus thawj TiN txheej, TiC txheej, tau dhau los ntawm TiC Al, 03 xim thooj txheej thiab TiCN, TiAlN thiab lwm qhov kev sib txuam ntau txheej txheem, tam sim no qhov tseeb ntawm TiN / NBN, TiN / CN thiab lwm cov ntaub ntawv ntau zaj duab xis, qhov kev ua tau zoo ntawm cov khoom txheej tau zoo heev lawm.

TiN yog cov khoom siv loj tshaj plaws thiab dav siv. Cov khoom siv TiN coated HSS cutters hauv kev tsim tau lub teb chaws tau tsim txog 50% ~ 70% ntawm HSS cutters, thiab kev siv tus qis ntawm qee cov kev txiav txim siab uas tsis yog regrindable tau tshaj 90% .Txawm rau kev ua haujlwm siab txog cov cuab yeej hlau niaj hnub no, TIN txheej tsis tau zoo zuj zus los ua haujlwm.Qhov oxidation tsis kam ntawm TiN txheej yog poorer, thaum siv kub yog 500 ℃ ; Cov yeeb yaj kiab tau pom tseeb thiab ua rau nws zoo, hardness ua tsis tau raws li qhov xav tau.TiC muaj dua microhardness, thiaj li hnav tsis kam ntawm cov khoom no zoo dua.Leej sijhawm, nws adheres nrees rau lub substrate. Hauv kev npaj ntawm ntau txheej txheej tiv thaiv uas tsis muaj zog, TiC feem ntau siv los ua cov duab yeeb yaj kiab hauv kev sib cuag nrog cov substrate. Nws yog ib qho txheej txheem heev hauv cov txheej txheej. Qhov kev tsim ntawm TiCN thiab TiAlN ntxiv rau kev ua haujlwm ntawm coated cutters.TiCN tuaj yeem txo qhov kev ntxhov siab ntawm lub txheej, ua kom lub zog ntawm lub txheej, ua kom lub thickness ntawm lub txheej, tiv thaiv cov diffusion ntawm cov kab nrib pleb, thiab txo qhov tawg breakage.TiCN yog teem raws li lub ntsiab hnav txheej ntawm lub coated cuab tam, uas tau ho txhim kho lub cuab tam lub neej.NiAlN muaj tshuaj zoo stability thiab anti-oxidation abrasion. Thaum ua cov hlau tawg-hlau, hlau tsis muaj hlau, titanium alloy thiab nickel alloy, qhov kev pab cuam lub neej ntawm tin-coated cutter yuav nce ntawm 3 ~ 4 zaug.Yog hais tias nws muaj siab concentration Al nyob hauv TiAlN txheej, ib qho txawv heev amorphous Al2O3 yuav tau tsim nyob rau ntawm lub txheej ntawm lub txheej thaum lub caij txiav, sib sau ua ib qho nyuaj hauv kev tiv thaiv film. Cov txheej txheem coated yuav ua tau zoo dua nyob rau hauv high-speed tej.Oxygen-doped titanium nitride TiCNO muaj siab heev microhardness thiab tshuaj stability, uas muaj peev xwm tsim tau ib qho kev sib npaug ntawm TIC + AL2O3.Some hloov hlau nitrides, carbides, borides thiab lawv txoj kev sib txuas, muaj qee qhov uas muaj kev kub ntxhov, cov ntaub ntawv no tuaj yeem tsim thiab siv rau cov txheej txheem, yuav ua kom muaj kev sib tw tshiab hauv kev ua yeeb yam txheej txheem.

2. Daim ntawv thov cov roj tsawg theem synthesis pob zeb diamond

Ntawm cov ntaub ntawv nyuab zaj duab xis hais saum toj no, muaj peb hom pob zeb diamond, cubic boron nitride CBN thiab carbon nitride nws cov microhardness HV muaj peev xwm tshaj 50GPa.These no muaj ntau cov ntaub ntawv ultra-siab hardness zaj duab xis tau qhib ib qho tseem ceeb siv rau txoj kev loj hlob ntawm coated cov cuab yeej siv zog, vim tias cov pob zeb tsis tshua muaj nqes thiab kim heev yog deb ntawm qhov kev xav tau ntawm kev ua lag luam niaj hnub no. Nyob hauv nruab nrab xyoo 1950, Tebchaws Asmeskas cov tuam txhab kev lag luam uas tsim cov khoom sib xyaw pob zeb diamonds, thiab tau cov pob zeb diamonds thiab cov pob zeb diamonds. yuav tsum tau ua haujlwm, nws tsis yooj yim rau kev thov nws rau cov cuab yeej saum toj.Polycrystalline pob zeb diamond tuaj (PCD) feem ntau siv hauv kev lag luam mechanical kuj muaj kev txwv vim lawv cov geometry yooj yim, tsis muaj chip breaker thiab cov tsis muaj tus geometric tsis tau.Thaum lub xyoo 1970s, pob zeb diamond nyias cov yeeb yaj kiab tau ua ke los ntawm cov thev naus ua kom tsis muaj pa tshuaj (LCVD). Tom qab ntau tshaj li ntawm 20 xyoo ntawm cov kev ua ub no, cov cuab yeej ntawm cov low-pressure vapor deposition rau pob zeb diamond thaum kawg tau ua ib qho loj tshaj plaws, thiab kev tshawb nrhiav pob zeb diamonds tau los ua ib lub ntsiab lus kub thoob ntiaj teb.

Pob zeb diamond thiab graphite muaj allotrope, pob zeb diamond Crystal yog cubic siv lead ua, thiab graphite yog hexagonal siv lead ua zog.Txawm ntau hom tsev sib txawv ntawm atoms, lawv cov kev kawm nws txawv heev.Thermodynamically, graphite yog ruaj khov dua pob zeb diamond.Qhov kev loj hlob ntawm pob zeb diamond hauv siab roj theem, hauv daim duab txheej txheem ntawm cov pa roj carbon dioxide, yog nyob hauv thaj av uas muaj graphite ruaj khov thiab pob zeb diamond metastable.However, vim hais tias cov tshuaj pots ntawm ob theem yog li kaw, ob theem tau tsim ua.Tus cuab yeej technology tsawg lub siab roj theem synthesis ntawm pob zeb diamond yog inhibiting graphite theem thiab qhia pob zeb diamond theem txoj kev loj hlob.Qhov feem ntau txoj kev sib tov yog cov xov hlau kub hlau.Plasma enhanced tshuaj vapor deposition (PECVD), xws li microwave PCVD, electron cyclotron resonance ecr-pcvd, dc thiab rf PCVD txoj hau kev; Dc thiab ntau zaus arc dischas ntshav cov qauv.Qhov kev tawm tswv yim zog hauv txheej txheem (xws li rf zog, microwave zog, thiab lwm yam), lub xeev qhib thiab opti mal ratio ntawm cov tshuaj tiv thaiv roj, thiab hom nucleation hauv cov txheej txheem kev tso dej, thiab lwm yam, ua lub luag haujlwm tseem ceeb hauv kev tsim cov pob zeb diamond.The siv lead ua thiab lattice constants ntawm substrate cov ntaub ntawv muaj feem xyuam rau kev nucleation ntawm pob zeb diamond zaj duab xis. Thaum diamond theem thiab graphite theem yog nucleated tib lub sij hawm nyob rau hauv lub substrate, lub graphite theem yuav loj hlob sai sai.Yog hais tias nws muaj cov concentration ntawm atomic hydrogen, nws yuav corrode hlob graphite thiab tshem tawm cov graphite theem. Txawm hais tias nws muaj corrode diamond theem, nws yog npaum li cas qeeb qis, thiaj li inhibit qhov kev loj hlob ntawm graphite theem.Tej yam yuav tsum tau rau lub pob zeb diamond zaj duab xis ntawm 600 ~ 900 ℃, yog li siv lub tshuab ua rau pob zeb diamond zaj duab xis ntawm cov nplaum ntawm cemented carbide txiav cov cuab yeej.

3. CBN thin film technology yog kom txhob ua tsis tau

Piv nrog cov khoom cua pob zeb diamonds, hluavtaws CBN zaj duab xis yog ib qhov kev tshawb nrhiav kev lig kev lig kev cai.CBN muaj peb lub isomers; CBN cubic sphalerite qauv; H-bx hexagonal graphite qauv; W-bn hexagonal wurtzite qauv.Qhov cov khoom ntawm peb lub isomers txawv heev. H-bn muaj ib lub qauv zoo heev rau graphite thiab ib tus mos muag heev. Nyob hauv w-bn thiab CBN, B thiab N atoms yuav tsum tsim kom muaj quad qauv sib koom ua ke. Lawv yog cov khoom siv ob qho tib si. Lub CBN tau los ntawm kev kub siab thiab kev kub siab yog cov siv lead ua muaj qhov siab tshaj li 84.3 GPa. Qhov zoo tshaj plaws microhardness ntawm CBN zaj duab xis yog 61.8GPa, thiab nws txoj kev kawm tsis yog tsawg tshaj li ntawm pob zeb diamond zaj duab xis.CBN yog thib ob tsuas yog pob zeb diamond hauv tho thiab thermal conductivity thiab muaj zoo thermal stability.Nyob rau hauv cov cua, nws tsis tshwm sim mus rau 1000 ℃ oxide.CBN muaj cov tshuaj tsw muaj zog heev rau hlau pawg hlau, uas txawv ntawm pob zeb diamond uas yog tsis haum rau kev ua hlau. Nws yuav dav siv rau kev sib tsoo thiab kev sib tsoo ntawm cov khoom siv hlau. Ntxiv rau qhov khoom siv kuj zoo kawg nkaus, CBN txheej yuav siv los ua cov cua sov uas tiv taus cov hlau, titanium alloy thiab steel hlau ntawm qhov siab ceev kev ceev, thiab siv tau los txiav kev nyuaj chais nrog cov tawv nqaij sib xyaw, cov khoom sib quenching thiab kev ua si al alo nrog cov cuab yeej siv hnyav heev.CVD thiab PVD txoj kev yog lub ntsiab txoj kev los ua ke CBN cov yeeb yaj kiab.CVD suav nrog tshuaj thauj PCVD, kub hlau pab cua sov PCVD, ecr-cvd, thiab lwm yam. PWD muaj xws li cov paib txoj hlua khawb ntawm cov pob zeb, cov hluav taws xob thiab cov hluav taws xob pabcuam tho ion.

Lub tshuab hluav taws xob ntawm CBN tseem muaj ntau txoj hauj lwm los ua hauv kev tshawb nrhiav thiab kev siv tshuab, nrog rau cov tshuaj tiv thaiv mechanism thiab zaj duab xis tsim cov txheej txheem, ntshav kuaj thiab huab hwm coj spectrometry, kev txiav txim ntawm cov txheej txheem zoo tshaj, kev loj hlob ntawm cov khoom siv high-efficiency, thiab lwm yam .

4. Cov tshuaj nitride uas muaj peev xwm tshaj lub pob zeb diamond

Thaum xyoo 1980, American scientists IIU thiab co-hen tsim tsim p-c3n4, ib qhov chaw tshiab xws li p-si3n4. Muaj ntau tus qauv, lub zog band thiab cov cim tus cwj pwm ntawm p-c3n4 raug xam los ntawm kev siv lub xeev lub cev physics thiab quantum chemistry kev tshawb xav, thiab nws tau pom hais tias cov ntim modulus ntawm cov nitride mus txog ntau yam zauv ntawm diamond.Thiab lub hardness ntawm cov khoom proportional to lub ntim modulus, lub hardness ntawm C3N4 yuav ncav lub hardness ntawm pob zeb, uas tau attracted cov xim ntawm cov kws tshawb fawb thoob ntiaj teb.Nyob rau hauv 1994, IIU luam tawm cov kev tshawb fawb tshiab E53. Nws tau txais txoj haujlwm initio ntawm txoj haujlwm ntawm tus qauv pib ntawm tus qauv ntawm cov qauv kev ua lag luam molecular dynamics (vs-md), ntxiv cov kev tshawb nrhiav theoretical ntawm qis zog C3N thiab cov khoom, thiab taw tes tias C thiab N yuav muaj peb cov qauv: P theem ntawm hexagonal siv lead ua, Sphalerite cov qauv ntawm qhov cub siv lead ua thiab cov qauv graphite zoo ib yam ntawm cov kev ua kom siv qhov sib xyaw qhov sib xyaw ua kom tiav. Xyoo 1996, Jeter thiab Hemley nyob hauv Tebchaws Asmeskas tseem siv thawj cov ntsiab lus ntawm initio calculations, tab sis tau hloov cov txheej txheem.Qhov kev sib txuas ntawm conjugate gradient yog siv los txo cov electron cov kev cai ntawm kev ywj pheej nyob rau hauv cov kev pib ua ntej.Qhov periodic function yog siv los nthuav cov electron nthwv dej rau hauv ob lub dav hlau tsis.Thaum cov txheej txheem kev txuag thiab kev txuag siv zog (ENHC) tau siv.C3N4 nrog tsib cov qauv tau, uas yog n-theem, p- theem, cubophase blende qauv, cubophase silicozinc E qauv thiab graphitic theem.Nyob rau cov graphite zoo li theem, qhov plaub yog tag nrho cov khoom superhard.The volume modulus ntawm E - cc 3 n 4 hauv cubic - theem silicozinc ore yog siab dua li cov pob zeb diamond.Yog li, carbon nitride tej zaum yuav muaj qhov nyuaj ntawm pob zeb diamond.

Kev ua tiav ntawm cov roj nitride yog ib qho piv txwv zoo tshaj plaws ntawm molecular engineering.Carbon nitride, raws li ib qho khoom siv superhard, yuav tsum muaj ntau lwm yam khoom siv lub cev thiab tshuaj. Lub ntsiab kev siv tshuaj carbon nitride yog dc thiab rf reactive sputtering.Laser evaporation thiab txoj kev ion nqaj pab cov txheej txheem, ECR-CVD txoj kev, ob chav ion beam deposition method, thiab lwm yam. Cov roj carbon nitride zaj tau los ntawm electron beam evaporative ion beam pab deposition ntawm okayama university nyob rau hauv Nyij Pooj tau lub siab tshaj plaws microhardness ntawm carbon nitride tam sim no - 63.8 GPa.China lub tsinghua tsev kawm ntawv kuj tau txais 60.8GPa cov kev kub nyhav carbon nitride, thiab wuhan tsev kawm ntawv hluavtaws cov roj nitrite nyuaj siab txog 50.0GPa9, thiab tso rau hauv HSS kev siv tho, thiab tau txais kev kawm zoo heev. Lub tswv yim tseem ceeb los npaj cov carbon nitride superhard coating yog kom tsis txhob muaj nag lossis daus ntawm graphite theem.