DLC lub cev vapor deposition method

DLC lub cev vapor deposition txoj kev suav nrog lub tshuab nqus tsev evaporation, tiv thaiv cua sov evaporation, induction cua sov evaporation, kub cathode ion plating, arc ion plating, reactive ion plating, RF ion plating, DC paug ion plating, thiab lwm yam. nkag mus rau hauv vapor deposition kom tag nrho cov txheej txheem deposition yog nqa tawm nyob rau hauv lub plasma, uas zoo heev txhim kho particle zog. Cov zaj duab xis-forming ceev ntawm ion plating yog ceev, daim ntawv cog lus ntawm cov zaj duab xis puag yog zoo, zaj duab xis txheej yog zoo, thiab nws yuav muab tso rau ntawm qhov kub thiab txias. Sib nqus lim cathode nqus arc deposition (FCVA) thev naus laus zis siv lub tshuab nqus hlau nplaum los lim tawm cov khoom loj thiab cov atoms nruab nrab uas tsim los ntawm qhov chaw arc, kom yuav luag tag nrho cov carbon ions ncav cuag lub substrate, thiab hydrogen-dawb DLC films tuaj yeem npaj tau. nrog rau siab deposition nqi. Qee cov neeg siv FCVA thev naus laus zis los ua cov yeeb yaj kiab tsis muaj hydrogen nrog sp3 cov ntsiab lus siab txog 90% thiab hardness siab txog 95 GPa, nws cov khoom zoo ib yam li cov ntaub ntawv pob zeb diamond polycrystalline. Cov txheej txheem sputtering yog raws li lub hauv paus ntsiab lus ntawm glow paug thiab cathode sputtering. Txoj kev magnetron sputtering yog siv argon ion Ar sputtering rau sputter graphite lub hom phiaj los ntawm DC intermediate zaus lossis RF hom. Lub zog faib ntawm sputtered carbon atoms txawv raws li lub zog thiab hom ntawm sputtered ions. Qhov zoo ntawm txoj kev no yog qhov ntsuas kub qis, cov khoom siv yooj yim, thaj chaw loj deposition, thiab cov yeeb yaj kiab siab thiab cov yeeb yaj kiab rwb thaiv tsev tuaj yeem tso.

IKS PVD tuam txhab, kho kom zoo nkauj txheej tshuab, cuab yeej txheej tshuab, DLC txheej tshuab, kho qhov muag txheej tshuab, PVD nqus txheej kab, txoj haujlwm tig-key yog muaj. Hu rau peb tam sim no, E-mail: iks.pvd@foxmail.com