Cov nyhuv ntawm qhov tsis zoo rau lub qauv thiab qhov kev tso tawm ntawm qhov ntau-Arc Arc Ion Plating TiN Films

Thaum siv cov khoom siv ntau cov khoom siv los tso rau hauv TiN thin film nyob rau ntawm cov nplaim hluav taws xob polished, nrog rau lwm yam tsis hloov pauv, qhov kev hloov ntawm qhov siab tshaj ntawm qhov kev xa tawm ntawm cov yeeb yaj kiab tau tshawb xyuas. Cov kev sim tau sim pom tias qhov nce ntawm qhov tsis zoo, qhov nqi xa tawm nce ntxiv tas mus li, tab sis tom qab qhov kev tsis zoo siab tuaj txog qee yam nqi, cov nqi dej nqi qis dua nrog qhov kev nce nqi ntawm kev thim qhov siab.

Vim nws txoj kev siab tawv, kev sib txhuam coefficient, kev siv tshuaj zoo, qhov xim zoo thiab zoo biocompatibility, TiN films dav siv nyob rau hauv mechanical, plastics, textiles, kev kho mob kev lag luam, microelectronics thiab lwm yam lag luam. Nws tau dhau los ua ib qho ntawm cov ntaub ntawv tshaj yeeb yaj kiab uas nyias siv nyias hauv kev tshawb fawb thiab daim ntawv thov tam sim no. Muaj ntau txoj kev los npaj TiN cov yeeb yaj duab, ntawm cov kev sib koom ua ke plating yog ib qho ntawm feem ntau siv yees nyob rau hauv kev lag luam hnub no. Txoj kev siv tshuab no yog pib hauv cov 60s thiab tau pib tsim txij thaum ntawd. Cov duab khaus tej co khoom siv muaj ntau yam zoo xws li cov yeeb yaj kiab zaj duab xis, qhov ceev ntawm zaj duab xis txheej, ntau cov khoom uas tau plated, zoo txheej puag ncig, thiab cov dej kub tsis txias. Txawm li cas los xij, muaj ntau yam uas cuam tshuam rau qhov zoo ntawm zaj duab xis thaum lub txheej txheem txheej txheem. Cov kev tshawb fawb hauv teb chaws thiab thoob ntiaj teb pom tau hais tias cov txheej txheem tseem ceeb muaj feem xyuam rau ntau hom kab mob plawv yog lub hom phiaj cathode tam sim no, cov pa roj carbon dioxide, cov roj substrate tsis zoo, nitrogen ib nrab siab, thiab cov khoom kub txheej txheem.

Nyob rau hauv daim ntawv no, peb tsuas yog kawm txog tus cwj pwm tsis zoo ntawm kev xa tawm. Thaum twg lub substrate negatively biased, ions nyob rau hauv cov ntshav yuav accelerated los ntawm qhov tsis zoo thoob fais teb rau lub substrate. Thaum ncav lub nplais ntawm lub substrate, lub ions bombard lub substrate thiab hloov lub zog tau txais los ntawm hluav taws xob mus rau lub substrate, uas ua rau qhov kub ntawm lub substrate mus sawv. Vim li no, qhov kev hloov tsis zoo ntawm lub substrate tsis txaus siab rau kev tso tawm tus nqi, kev nyob sab hauv siab, khoov quab yuam hauv zaj duab xis thiab cov substrate, cov kev txuam ntawm qhov membrane / pib hauv txheej txheej. Hloov qhov tsis zoo ntawm lub substrate tuaj yeem kho lub zog ntawm cov ion deposited thiab qhov kub ntawm qhov substrate nto kom tswj tau cov txheej zoo. Tus cwj pwm tsis zoo ntawm tus qauv thiab cov khoom siv ntawm ntau qhov Arc ion plating TiN tau kawm thiab tau tshaj tawm. Txawm li cas los xij, qhov tshwm sim ntawm kev tsis zoo siab rau qhov kev xa tawm ntawm cov yeeb yaj kiab nyias yeej tsis tshua muaj. Tsab xov xwm no npaj siab kawm txog qhov tsis zoo ntawm kev tsis ncaj ncees rau zaj duab xis pov tseg.

1. Txoj kev sim

Polished high-speed hlau yog siv los ua cov ntaub ntawv pib. Tus qauv yog ultrasonically ntxuav nrog tsis ethanol rau 20 min, thiab tom qab ntawd ces cov nplais ntawm cov substrate tau nrog cov ethanol thiab acetone kua, ces qhuav, thiab pheej muab tso rau ntawm cov kablus ntawm cov multi-arc ion txheej system, qhov ntev ntawm cov hom phiaj thiab cov substrate yog 250 hli. Thaum lub tshuab nqus tsev nqus dej pumped mus rau lub tshuab nqus tsev ntawm 2.6 × 10 -3 Pa, Argon roj tau them mus rau 5 Pa ~ 10 Pa, thiab qhov tsis zoo siab ntawm 500 V tau siv rau cov khoom ua haujlwm. Tom qab tswj 2 min mus rau 3 min, qhov hluav taws xob tau raug tsa mus rau 900 V. Argon gas cov ntaub ntawv ib lub lavender plasma glow raws li kev tawm tsawg tsawg, thiab nyob rau hauv qhov kev txiav txim ntawm ib cheeb tsam hluav taws xob, argon ions bombard lub workpiece. Tom qab ntxuav lub qhov muag, cov pa roj carbon dioxide yog txo txog 2 Pa, qhov tsis zoo siv qhov siab ntawm 900 V yog siv rau cov khoom siv, thiab lub Ti phiaj yog taws, ces lub substrate yog bombarded nrog high-energy hlau ions. Tom qab tu, qhov tsis zoo thim qhov siab tau hloov mus rau 0 V, -50 V, -100 V, -150 V, -200 V, thiab -250 V feem. Thiab TiN films tau tso. Thaum lub txheej txheem txheej txheem, qhov arc voltage U = 20 V, lub caij tam sim no I = 65 A, thiab lub sij hawm tso tawm yog 30 min. Xoo hluav taws xob diffraction tau siv los txheeb xyuas qhov theem ntawm cov yeeb yaj kiab. Lub microstructure ntawm txheej yog soj ntsuam los ntawm kev xa khoom electron microscopy. Zaj duab xis thickness yog ntsuas siv XP-2 profiler. Lub sij hawm tso tawm ces tau xam raws lub ntsuas cov thickness thiab deposition lub sij hawm.

2. Tshawb nrhiav thiab sojntsuam

2.1. Cov txheej txheem theem ntawm cov yeeb yaj kiab nyob rau hauv kev sib txawv

Daim duab qhia tau tias X-ray diffraction tus qauv ntawm zaj duab xis. Qhov kev tshuaj ntsuam qhia tau hais tias lub sijhawm ntawm cov zaj duab xis yog TiN theem. Thaum tsis muaj kev thuam, qhov kev tiv thaiv tawm ntawm TiN (200) thiab (220) siv lead ua dav yuav pom, tab sis (111) diffraction peak yuav luag xoom. Qhov muaj zog tshaj plaws nyob rau hauv kab no yog los ntawm lub hauv paus Fe (111), uas qhia tau hais tias cov zaj duab xis thickness yog me thiab X-rays tau nkag mus rau substrate. Nrog rau kev nce ntawm qhov kev xav ntawm qhov tseeb, qhov (111) siv lead ua pib tshwm, thiab qhov (200) qhov kev nyiam dua yog qhov tsis muaj zog. Thaum twg qhov kev tsis sib haum xeeb siab txog 200 V, TiN movie qhia tau hais tias muaj zog (111) nyiam. Peb nco ntsoov tias Fe (111) ncov tsis yooj yim zuj zus li qhov kev hloov hluav taws xob nce ntxiv, uas qhia tau hais tias cov zaj duab xis thickness maj ua loj dua.

Daim duab 1 XRD diffraction tus qauv ntawm TiN cov yeeb yaj duab tau txais los ntawm kev sib txawv ntawm kev sib thooj

2.2. Txheej saum npoo Morphology

Daim duab 2 Ntoo morphology ntawm TiN txheej

Nyob rau hauv multi-Arc ion plating txheej, muaj dispersed ib qhov me me rau ntawm qhov chaw. Nws feem ntau ntseeg hais tias lub hom phiaj yog melted rau hauv me me mob hauv lub siab kub ntawm lub zos arc thiab kev txhaj, thiab ces adhered mus rau txheej coating nyob rau hauv daim ntawv ntawm ib txwm hais. Lub zog ntawm cov puav no qis tshaj qhov ntawm TiN movie. Cov pob zeb me me no yuav ua rau qhov kev ua kom zoo ntawm lub cuab tam thiab tseem txo cov nplaim ntawm lub cuab tam. Nws muaj peev xwm raug pom los ntawm kev xa khoom electron microscopy uas TiN txheej txheej feem ntau yog nyob rau ntau qhov ntawm 1 μm txog 2 μm, thiab cov zauv ntawm 5 μm me me.