Reactive magnetron sputtering txheej

Reactive magnetron sputtering txheej
Reactive sputtering yog txheej txheem uas nyias zaj duab xis ntawm cov tebchaw tso los ntawm kev qhia cov pa roj reactive (oxygen lossis nitrogen). Nws feem ntau yog siv rau sputtering oxides, nitrides, carbides, thiab mixs ntawm tag nrho peb. Nyob rau hauv cov txheej txheem reactive sputtering, cov tshuaj tiv thaiv roj reacts nrog lub hom phiaj sputtering thiab muab tso rau ntawm lub substrate. Lub hom phiaj ntawm reactive sputtering yog los tsim cov yeeb yaj kiab nyias uas yog stoichiometric thiab tswj cov txheej txheem. Cov muaj pes tsawg leeg ntawm cov yeeb yaj kiab tuaj yeem tswj tau los ntawm kev tswj cov khoom sib txheeb ntawm inert gas thiab reactive gas.

IKS PVD tuam txhab, kho kom zoo nkauj txheej tshuab, cuab yeej txheej tshuab, DLC txheej tshuab, kho qhov muag txheej tshuab, PVD nqus txheej kab, txoj haujlwm tig-key yog muaj. Hu rau peb tam sim no, E-mail:iks.pvd@foxmail.com