Txoj kev tshawb ntawm Adhesion ntawm pob zeb diamonds (DLC) Films Deposited By Mem tes Ion Plating Tshuab - Tus Kws Khoos Phom
Apr 18, 2018| Adhesion ntawm cov yeeb yaj kiab nyias yog ib qho qhia tau zoo, thiab feem ntau xa mus rau qhov kev sib tw ntawm kev sib tw ntawm zaj yeeb yaj kiab thiab substrate. Thaum lub sij hawm txheej txheem ntawm DLC zaj duab xis, nws pom tau hais tias zaj yeeb yaj kiab tau tawm ntawm lub substrate, thiab feem ntau hom yog: Ib qho yog tias qhov yeeb yaj kiab tsis zoo ua rau lub substrate, thiab tsis muaj cheeb tsam hloov ntawm qhov yeeb yaj kiab thiab lub substrate. Thaum twg sab nraud quab yuam yog ntau dua, zaj duab xis tag nrho tawm ntawm lub substrate. Qhov thib ob hom yog tias thaj tsam kev hloov ntawm thaj av thiab cov substrate, thiab muaj kev sib zog ua kom muaj zog. Txawm li cas los, vim muaj ib lub laj thawj, lub sab hauv kev nyuaj siab ntawm zaj duab xis yog loj dhau, cov zaj duab xis yog puas, thiab ces demolding.
Cov xwm txheej muaj feem xyuam nrog thawj hom yeeb yaj kiab tso tawm: hom ntawm cov khoom siv substrate, qhov huv ntawm qhov dej ntawm lub substrate, thiab lub zog ntawm cov nqi. Rau ntau hom substrates, DLC films muaj sib txawv zog raws li txoj kev hloov cheeb tsam ntawm lawv, thiab cov ntaub ntawv los ntawm kev sib tw ntawm cov molecules sib txawv, ces qhov stability yog txawv. Thaum cov nplais ntawm lub substrate tsis huv, thiab qee qhov kev xiam oob qhab yog adsorbed nyob rau ntawm cov nplais ntawm lub substrate los yog lub zog ntawm cov nqi uas tau raug qis heev, cov khoom sib txuas ntawm DLC zaj duab xis thiab cov substrate txo, thiab cov zaj duab xis yog tev tawm ntawm lub substrate ua ib tug lej. Thaum cov khoom tso tawm yog txiav txim siab, lub zog ntawm cov khoom uas tau tso tawm tsuas yog ntsig txog qhov hluav taws xob ntawm lub voj voog loj, thiab lub zog ntawm cov nqi uas tau them tau los ntawm kev xaiv qhov hluav taws xob hauv lub qhov hluav taws xob.
Ntawm ob sab substrates kuaj, qhov adhesion ntawm titanium substrate yog qhov zoo tshaj plaws, raws li cov silicon substrate, raws li tus germanium substrate, thiab qhov phem rau cov C-muaj hlau substrate, thiab cov txheej txheem hloov. Cov phenomenon ntawm zaj duab xis tso vim muaj kev nyuab siab zaj duab xis, cov hardness thiab qhov kub ntawm cov khoom siv substrate sib txawv, thiab qhov phenomenon kuj txawv. Thiab peb lub phenomena tshwm sim yog:
(1) Thaum cov tawv nqaij ntawm cov khoom siv tsis yog, thiab zaj duab xis tawm ntawm lub substrate, hloov txheej txheej ntawm zaj duab xis thiab lub substrate tau tsim thiab muaj kev yooj yim dua, thiaj li hais tias qhov saum npoo ntawm substrate zaj duab xis yog peeled tawm. Piv txwv li, thaum DLC zaj duab xis yog plated rau ib qhov Ge lossis Si substrate, xws li tshwm sim feem ntau tshwm sim, thiab qhov saum npoo ntawm lub substrate puas lawm, thiab lub tsho tawm ntawm lub qhov ntim tsawg tshaj 0.1 hli. Qhov loj me me yog qhov kev sib raug zoo rau cov kev tawv nqaij ntawm cov nqes dej ntawm sab nraud, lub siab tawv, thaum lub hauv siab tsawg zog pom obviously.
(2) Thaum lub zog ntawm cov khoom siv ua kom siab, cov yeeb yaj kiab tawm ntawm lub substrate thiab muaj ib cov yeeb yaj kiab seem ntawm lub hauv paus, thiab nws tuaj yeem tsis raug muab tshem tawm los ntawm txoj kev tu tsev. Qhov no kuj qhia tau hais tias hloov txheej txheej ntawm zaj duab xis thiab lub substrate tau tsim thiab muaj kev siab loj, vim hais tias kev ntxhov siab ntawm zaj duab xis ua rau cov yeeb yaj kiab yuav raug tshem tawm.
(3) Thaum qhov kub ntawm lub substrate siab dhau lawm, lub pob zeb ntawm lub yeeb yaj kiab tsis tshwm sim nruab nrab ntawm qhov sib txuas ntawm zaj duab xis thiab lub substrate, tab sis nyob rau hauv zaj duab xis, thiab cov kab xev khov nyhav yog square thiab tsis nyob tib qho chaw.
Los ntawm cov saum toj no peb hom phenomena, DLC zaj duab xis yog plated los ntawm cov nqus plua plav arc ion plating, thiab hloov txheej txheej tau tsim ntawm zaj duab xis thiab cov substrate, thiab nws muaj adhesion siab, uas yog qhov kom zoo dua ntawm ion plating.


