Nqus txheej tshuab thiab khoom siv ob pua xyoos ntawm kev txhim kho keeb kwm

Nqus txheej tshuab thiab khoom siv ob pua xyoos ntawm kev txhim kho keeb kwm

IKS PVD, peb muaj siab heev PVD nqus txheej tshuab, iks.pvd@foxmail.com

Muaj ntau tus neeg tabtom nqis peev hauv 3D cov iav thiab OLED, thiab ua cov khoom zoo li no, koj yuav tsum to taub qhov tseem ceeb tshaj plaws, txheej.

Cov nram no yog keeb kwm kev loj hlob ntawm lub ntiaj teb txheej txheej. Tej zaum koj yuav pom nws raws li daim ntawv qhia zais cia ntawm tsev neeg. Raws li thaum ntxov ntau xyoo dhau los, ib tug neeg ua nws thiab nws tau industrialized rau ntau rounds. Tom qab nyeem zaj lus no, koj tuaj yeem hais, tsis txhob dag kuv, Kuv tseem nyeem txog keeb kwm ntawm txheej ...

Kev siv tshuaj tiv thaiv yog thawj zaug siv los npaj cov yeeb yaj kiab hauv qhov chaw ntawm qhov muag. Tom qab ntawd, xyoo 1817, Fraunhofe nyob rau hauv lub teb chaws Yelemees nrog concentrated sulfuric acid los yog nitric acid yaj ntawm iav, qee zaus tau txais thawj zaug los tiv thaiv cov duab yeeb yaj duab, ua ntej 1835 ib tug neeg nrog ntub dej sib cais ntawm cov xim nyiaj iav zaj duab xis lawv yog thawj qhov kev npaj kho qhov muag ntiaj teb. Tom qab ntawd, ntau lub dav hlau kho qhov muag tau plated nyob rau hauv cov tshuaj chemical thiab cov vapors. Hauv lub sijhawm xyoo 1950, tsuas yog qee qhov kev siv cov yeeb yaj duab los tiv thaiv ntawm cov yeeb yaj kiab loj loj thiab ceev nrawm, cov tshuaj kua hloov tau yooj yim hloov los ntawm lub tshuab nqus tsev.

Lub tshuab nqus tsev evaporation thiab cov pleev xim yog ob yam tseem ceeb tshaj plaws rau kev npaj cov yeeb yaj kiab hauv kev lag luam. Lawv siv rau ntawm ib qho loj teev, qhov tseeb, tom qab qhov tshwm sim ntawm cov roj diffusion twj, qhov chaw ua kom siv zog, xyoo 1930.

Nyob rau hauv 1935, ib cov yeeb yaj kiab nkaus xwb yog tsim los rau lub tshuab nqus tsev evaporation deposition. Tab sis nws yog thawj zaug siv tom qab 1945 kom lo lo ntsiab muag.

Nyob rau hauv 1938, Tebchaws Asmeskas thiab Cov Tebchaws Europe tau tsim ib zaj duab xis ob leeg, tab sis nws tsis yog txog thaum xyoo 1949 uas tau tsim cov khoom zoo.

Hauv xyoo 1965, muaj ib txoj kab kev loj hlob ntawm peb lub cev tsim tawm. Nyob rau hauv cov nqe lus ntawm zaj duab xis, hluav taws xob hluav taws xob ua thawj aluminized teeb nyob rau hauv 1937. Lub teb chaws Yelemees nyob rau hauv tib lub xyoo ua thawj kev kho mob hnav - tawv rhodium zaj duab xis. Nyob rau hauv cov ntaub ntawv ntawm lim, hlau-dielectric zaj duab xis Fabry----Perot cuam tshuam lim tso hauv lub teb chaws Yelemees xyoo 1939.

Nyob rau hauv thaj tsam ntawm kev pleev xim rau txheej, txog 1858, Cov kws tshawb fawb British thiab German tau tshawb pom tshwm sim rau hauv kev sim. Cov tshuab tau hloov maj mam.

Nyob rau xyoo 1955, tom qab lub tshuab hluav taws xob loj heev tau npaj siab los ntawm Wehner, tshuab xiav npo tsim tau sai thiab tau los ua ib qho kev ua yeeb yam zoo nkauj. Cov txheej txheem dej ntsaws seem muaj xws li bipolar sputtering, tripole sputtering, reactive sputtering, magnetron sputtering thiab ob qho tib si ion sputtering.

Txij thaum xyoo 1950, cov yeeb yaj kiab pom tau zoo tsim nyob hauv txheej tshuab thiab computer-aided tsim. Nyob rau hauv cov qauv ntawm cov txheej, tau kawm txog cov koob yees duab tshiab ion - based technologies thiab tau siv.

Nyob rau xyoo 1953, Aubarter ntawm lub Tebchaws Amelikas tau thov rau patent ntawm cov yeeb yuj pleev xim rau cov yeeb yaj kiab rau cov khoom cua thiab cov khoom siv ua kom cov pa tshuaj muaj zog nrog cov roj ionized.

Nyob rau xyoo 1964, Mattox ion plating system tau qhia los ntawm kev tshawb xyuas yav dhau los. Lub sij hawm ntawd, txoj haujlwm ion system tau ua haujlwm hauv 10Pa siab thiab 2KV tawm hluav taws xob. Nws tau siv rau txheej tsho-resisting thiab cov hom phiaj zoo nkauj rau cov hlau, tsis haum rau qhov muag pom kev nyias thin film. Tom qab ntawd, qhov muag ntsia hlau tau muab tso rau hauv cov ntaub ntawv insulating xws li iav los ntawm cov thawv plhaws loj. Txij li thaum xyoo 1970, muaj kev kawm tshiab thiab tau ua tiav, nrog rau kev pabcuam ion, pabcuam rhiab pobzeb thiab ntshav kom sib luag ntawm cov tshuaj vapor sib npaug. Vim yog siv cov nquag ions, lawv muab cov kev ua kom txaus thiab ua rau kom qhov ceev ceev ntawm qhov chaw. Kev tshawb nrhiav thiab kev loj hlob ntawm kev kho qhov muag pom kev tsim yeeb yaj kiab yog tsim kom muaj kev sib txuas ntawm adsorbed atoms thiab tsis txhob tsim kom muaj kev sib sau ua ib qho kev sib txuas lus, thiaj li txhim kho cov khoom ntawm qhov muag pleev zaj duab xis kom nyias nyias.

Qhov tseeb tiag, kev tsim cov txheej txheem nqus tsev txheej txheem ntau dua. Cia wb mus saib ntawm no keeb kwm muaj 200 tawm xyoos ntawm kev siv tshuab:

Nyob rau hauv lub xyoo pua puv 19

Nqus plab npog muaj keeb kwm txog 200 xyoo. Nyob rau hauv lub xyoo pua puv 19, nws yog nyob rau theem ntawm kev tshawb kawm thiab kev sim ua ntej. Cov teebmeem ntawm tus neeg nrhiav kev pabcuam raug teeb puv sijhawm rau lub sijhawm no.

Nyob rau xyoo 1805, txoj kev sib raug zoo ntawm kev sib txuas ntawm lub npe thiab lub zog ntawm sab (Hluas) tau kawm.

Lub Fraunhofer yog tsim ntawm lub lens.

Nyob rau hauv 1839, kev tshawb fawb pib ntawm arc evaporation (Hare).

Xyoo 1852, nws tau pib kawm nqus plua plav (Grove; Pulker).

Nyob rau hauv 1857, cov xaim tau paug hauv nitrogen ua ib zaj duab xis nyias (Faraday; Conn).

Nyob rau hauv 1874, nws tau tshaj tawm tias yuav tsum ua rau hauv cov ntshav polymer (Dewilde; Thenard).

Hauv xyoo 1877, lub qhov nqus dej nqus pov tseg ntawm cov yeeb yaj kiab nyias yeej kawm tiav (Wright).

1880, hydrocarbon gas theem pyrolysis (Sawyer; Mann).

1887, nqus dej evaporation ntawm nyias zaj duab xis (crucible) (Nahrwold; Pohl; Pringsheim).

Nyob rau hauv 1896, cov txheej txheem tshuaj rau kev tsim ib zaj duab xis antireflective yog tsim tau.

Nyob rau hauv 1897, txoj kev txo qis hydrogen tungsten tetrachloride (CVD) tau kawm tiav. Optical interferometry ntawm film thickness (Wiener).

Thawj 50 xyoo ntawm xyoo pua 20th

1904 Edison yog patented rau sputtering nyiaj ntawm cov thooj voos kheej kheej.

Nyob rau xyoo 1907, cov khoom siv hluav taws xob evaporation tshuab (Soddy) tau kawm.

Xyoo 1913, kev tshawb fawb ntawm adsorption isotherms (Langmuir, Knudsen, Knacke, thiab lwm yam).

Nyias cov yeeb nkab tsis tso tawm los ntawm cov txiv ntoo ntawm cov iav tsom iav, 1917.

1920 Guntherschulzer, kev xav ntawm kev xav.

Nyob rau hauv 1928, lub tshuab nqus hlau vaporization ntawm tungsten filament (Ritsehl, Cartwright, thiab lwm yam).

Hauv xyoo 1930, qhov tseeb cua theem vaporized rau daim ntawv ultrafine (pfunds).

Nyob rau hauv 1934, lub winding plating ntawm kub on translucent cellophane (Kurz, Whiley); Siv tshuaj ntxuav cov iav rau zaj duab xis deposits (Bauer, Strong).

Nyob rau hauv 1935, cov evaporation qhuav ntawm Cd: Mg thiab Zn rau cov ntawv hlau hlau ua tau zoo kawm (Bausch, Mansbridge). Muaj zog iav rau paloma 100-inch telescope; Optical lens coated nrog ib txheej ntawm anti-reflection zaj duab xis (Strong, Smakula); Kawm ntawm txoj kev loj hlob ntawm lub yeeb yam ntawm cov duab xis (Andrade, Matindale).

Xyoo 1937, lub taub dej tob taub hau uas siv cov hlau lead ua tau tsim (Wright). Lub tshuab nqus tsev ntawm qhov hluav taws xob (evaporative txheej) (Whiley) tau ua tiav zoo. Penning magnetron enhanced sputtering txheej yog ntse tsim.

Nyob rau hauv 1938, Berghaus tau patented rau evaporation tom qab ion bombardment ntawm qhov chaw. Xyoo 1939 ob lub laujkaub zom zaws tau zoo siv (Cartwright, Turner).

Hauv xyoo 1941, lub tshuab nqus tsev aluminized yog ua ntawv ci rau radar.

Xyoo 1942, peb cov pob coilings tau plated (Geffcken). Qhov hlau ion qhov chaw rau isotope sib cais tau zoo tau tsim.

Hauv xyoo 1944, hluav taws xob ntxuav hluav taws xob tau tsim (Rice, Dimmick).

Nyob rau hauv 1945, ntau cov poj niam Banning ntau yam ntxaij lim dej (Banning, Hoffman).

Xyoo 1946, qhov tuab ntawm cov yeeb yaj kiab nyias yog ntsuas los ntawm X-ray txoj kev nqus (Friedman, Birks). Goodfellow lub tuam txhab ntawm lub tebchaws United Kingdom.

Hauv xyoo 1947, daim iav ntawm 200-inch tsom iav raj muaj hlau plated.

Nyob rau hauv 1948, lub teb chaws optical laboratory (OCLI) raug tsim los. Lub tshuab nqus tsev sai sai evaporation ntawm cov khoom tso tawm (Harris, Siegel); Cov thickness film tswj tau los ntawm lub teeb hloov (Dufour).

Nyob rau hauv 1949, kev tshawb fawb ntawm txoj kev loj hlob morphology ntawm cov yeeb yam hlau tsis sib xws (Schulz).

Xyoo 1950, kev tshawb nrhiav kev xav tau yog tsim los (Wehner). Kev lag luam ntawm cov lag luam pib tau pib tawm; Ntau hom kev lag luam microelectronics pib siv tawm; Kev loj hlob ntawm lub teeb tsom iav (Turner, Hoffman, Schroder); Cov hniav yas yeeb yaj duab pib tshwm (Holland li al.

Lub xeem 50 xyoo ntawm xyoo pua 20th

Qhov no yog qhov 50 xyoos uas siv tshuab fuabtais tawm. Kev tsim cov khoom nqus tau thiab nqus ntsuas yog qhov kev txiav txim siab rau qhov kev lag luam ceev ceev ntawm cov yeeb yaj kiab.

Hauv xyoo 1952, txoj kev ntxuav tsev tu cov khoom tu kom tsis tuaj yeem ua kom tsis tu ncua. Cov ntsiab lus tshiab evaporation txoj kev (Auwarter, Brinsmaid) tau kawm. Kev tshawb fawb tshuaj corrosion plasma polymer tau kawm.

1953 lub koom haum American nqus tsev tau tsim; Cov khoom siv ua yeeb yaj kiab (Antireflective films) uas ua los ntawm qhov sib tw thiab txheej (3M).

Hauv xyoo 1954, lub tuam txhab tau pib tsim ib lub tshuab nqus tsev tshiab thiab cov tshuab txheej (Leybold company).

Hauv xyoo 1955, txoj hlua hluav taws xob hauv hluav taws xob siv hluav taws xob rau cov khoom cua zaj duab xis pib tuaj ntsiag to (Ruhle). Ib qho rf sputtering rau dielectric (Wehner) tau npaj siab.

Xyoo 1956 yog thawj American tsheb uas muaj hlau lo yog pib (Ford motor company).

Hauv xyoo 1957, txoj kev siv lub tshuab nqus tsev hlau plating yog txais los ntawm kev lag luam aviation. Txhim kho txoj hauv kev ua kom pom ntawm cov yeeb yaj kiab (Brismaid, Auwarter et al.). American vacuum coating zej zog yog founded.

Nyob rau hauv 1958, zaj yeeb yaj kiab epitaxial loj hlob technology tau ntse tsim (Gunther). NASA tau nrhiav tau.

1959 hlau nplaum xim khoom tsim (Temescal corporation).

Hauv xyoo 1960, txoj kab npoo plhom dej ntawm lub cev ua haujlwm tau tshwm sim (Sharp, Schorhorm). Kev loj hlob ntawm ion los rau cov khoom siv fais fab (Kauffman); Lub quartz Crystal film thickness measuring instrument tau tsim tau zoo.

Tsawg-emissivity iav raug tsim nyob rau xyoo 1961 (Leybold); Pib pib kawm cov qoob loo ntawm cov ntsiab lus (Laegried, Yamamura, thiab lwm yam).

Hauv xyoo 1962, txoj kev ntsuam xyuas cov tshuaj lom neeg tshuaj ntsuam tau tshuaj xyuas. Arc vapor deposition ntawm carbon (Massey) thiab hlau (Lucas); Rf nqus tau txoj hauv kev tu tsiaj (Stuart, Anderson et al.); Leybold cov khoom tau nkag mus hauv Asmeskas lag luam; Yog li cia wb xav txog vapor siab ntawm lub caij.

Hauv xyoo 1963, cov khoom siv tas mus li nrog ib nrab qhov atmospheric kis tau (Charschan, Savach, thiab lwm yam) tau tsim. Cov txheej txheem ion plating tau zoo tsim (Mattox).

Xyoo 1964, PECVD (plasma enhanced chemical vapor deposition) txoj kev yees duab rau photovoltaic films tau zoo tsim (Bradley li al.).

Xyoo 1965, kev siv txoj kev nqus dej pov tseg yog qhov tsim tau zoo (Maissel li al.). Lub laser vapor deposition method rau nyias films tau ntse tsim (Smith, Turner). Lub rf sputtering deposition method ntawm insulating cov ntaub ntawv tau ntse tsim (Davidse, Anderson et al.). Cov txheej txheem laser deposition method tau ntse tau tsim (Smith et al.); Lub tshuab nqus hlau cov xim hlau siv hlau ntxig rau cov yeeb yaj kiab (acetate film) tau ntse tsim (Galileo).

Nyob rau hauv 1966, ion aluminized reactors (Mattox, thiab lwm yam); Qhov xuab txheej txheej ntawm cov hlau siv ua roj nplua nyeem tau ntse tsim (Spalvins). Zoo adhesion ntawm tshav ntuj reflection zaj duab xis (3M lub tuam txhab).

Nyob rau xyoo 1967, chromium plating rau ntawm lub tshuab txiav nplawm tau pib tiav (Txoj kab). Lub tshuab nqus tsev ion txheej txheem tau patented (Mattox). Tripole txoj kev siv tshuaj pleev tau zoo yog tsim tau (Baun, Wan, etc.). Mattox tso rau ntawm lub tshuab nqus tsev.

Xyoo 1968, hauv ib lub thawv rau khoom, ib feem me me ntawm cov txheej txheem ion (Mattox, Klein), txheej txheem uas tau pom hauv kev lag luam aerospace raws li ion vapor deposition.

Xyoo 1969, magnetron qhwv tau tawm hauv qhov chaw hemispherical, thiab ntau qhov chaw sib kis tau patented (Mullay). Leybold tus tshiab yeeb yaj kiab zaj duab xis tawm tuaj. Evaporation zaj duab xis morphological chart luam tawm.

Nyob rau hauv xyoo 1970, ntau lub tshuab nqus hlau yees tau siv rau hauv ib qho kev lag luam. Txoj kev loj hlob ntawm nyias zaj duab xis tshuab tau nkag mus rau ib lub hnub nyoog golden.

Nyob rau xyoo 1970, lub qhov hluav taws xob cathode hluav taws xob muaj lub tshuab evaporation no tau ua tiav (ULVAC); Lub siab tso tawm ntau lub tshuab ua kom siv lub tshuab (OCLI) ntau heev. Hollow cathode ion coating khoom nyob rau hauv Nyiv (ULVAC Corporation).

Cov tuam txhab uas tau cog cov iav uas yog cov neeg tawg rog nyob hauv ntau lub teb chaws nyob rau xyoo 1971. Cov yeeb yaj kiab hauv qab no tau ntse tsim (Aisenberg li al.); Patented magnetron sputtering txoj hauv cov khoom siv conical (Clarke); Cov kev lag luam anode evaporation ntawm txhua txoj hauj lwm (Snaper, Sablev); Thaum lub sij hawm evaporation, cov ntshav ntawm cov roj siv tau ua haujlwm (Heitman, Auwarter, thiab lwm yam). Kev loj hlob ntawm cov ntawv luam yeeb aluminized (Galileo); Ib qho ion txheej ntaus ntawv siv ib qho hluav taws xob nqaj evaporation los ntawm qhov chaw (Chamber corporation).

Nyob rau hauv 1972, txoj kev Tagaki tau tsim. Nqus nqus plua plav txuam cov nplais uas muaj xuab zeb (Weissmantel); Txoj kev tshawb fawb ntawm kev sib txuam ntawm kev sib tsoo ntawm membrane morphology (mattox li al.); Nyias - xaim txheej khoom siv tau dav siv.

Nyob rau hauv xyoo 1973, cov kev lag luam electroplating tau txais cov khoom siv zoo thiab pheej yig tshiab ion xim khoom siv (Bell tuam txhab); Plasma enhanced chemical vapor deposition (PECVD) nyob rau hauv cov phaj plate reactors (Reinberg).

Nyob rau hauv 1974, lub ultra-violet - ozone tu tshuab tshwm (Sowell, Cuthrell, thiab lwm yam.). Kawm txog kev nyuaj siab nyob rau hauv ion bombardment films (Sowell, Cuthrell et al.); Cov cuab yeej ntawm kev sib cog lus ntawm hlau nplaum yog patented (Chapin).

Hauv xyoo 1975, cov txheej txheem reactive ion coating tau zoo tsim (Murayama li al.). · Patented cylindrical cathode magnetron sputtering tshuab (Penfold, lwm yam.) Ⅲ - Cov khoom siv ntawm semiconductor khoom molecular beam epitaxy (MBE) tau zoo tsim (Cho, Arthur); Lwm txoj kev ion coating tshuab tau ntse tsim tau (Schiller); Chevrolet tshwm rau ntawm ib lub tsheb.

Hauv xyoo 1976, siv phom ion siv los tso duab rau hauv ib qho chaw sib tw ua ke (Weissmantel).

Hauv xyoo 1977, txoj kev nruab nrab ntawm cov qauv nruab nrab ntawm cov pa luam yeeb magnetron reattuting yog qhov ua tau zoo heev (Cormia, thiab lwm yam). Nqus winding plating ntawm ITO zaj duab xis tau ntse tsim (Sierracin, Sheldahl, thiab lwm yam). · Tsim cov khoom siv rau hauv cov nplaum iav (AircoTemescal) rau hauv cov nplaum rau hauv online. Sputtering thin film morphology (Thornton li al.); Sputter - rhuab iav lo (Chahroudi) on nyias xaim. Nyob rau xyoo 1978, qhov muag kho qhov txawv ntawm qhov yeeb yaj kiab tau plated hauv nyias lub vev xaib (Coburn lub tuam txhab); Kev txhim kho ntawm cov khoom sib hloo ntawm evaporation (Dorodnov); Kev loj hlob ntawm cov kua ntshav ua kua (evaporation) (Aksenov li al.); Lub qhov rais tau zoo tsim los ntawm ITO zaj duab xis tshuab raj (tom qab ntawd hu ua CP)

Hauv xyoo 1979, kev lag luam on-line qis-emissivity iav txheej raug tso rau kev siv. Sputtering deposition network zaj duab xis mus cuag industrialization (CormiaChahroudi tuam txhab); Patented planar magnetron cathode sputtering (BOCCT); Ib qho tshiab hauv online khov dej khov iav hnoos qwj nplaum (Leybold).

Xyoo 1980, kev siv phom ion raug siv los txhim kho cov kev ntxhov siab ntawm steamed chromium movie (Hoffman, Gaerttner). Tus thawj loj loj ntim cov pa coiling thiab coating tuaj tawm (Leybold); Muaj ntau lub pob zeb khov dej muaj kev lag luam hauv Tebchaws Meskas. Ag - raws thermal tswj txheej after industrialization (Leubold tuam txhab).

Hauv xyoo 1981, lub cev ntim khoom siv vapor tau siv los ua lub zog hauv cov cuab yeej siv. Hniav thiab ntau lub week rau khoom kho (Leybold); Sputtering ion plating ntawm zoo nkauj zaj duab xis (Leybold company); Sputtering coil plating ntaus ntawv (Leybold); Online ITO - Ag - ITO coating cov khoom muaj nqi siab (Leybold); Ib cov yeeb yaj kiab uas tho nyiaj dawb tsim tau tsim (3M).

Nyob rau hauv 1982, cov roj evaporation ntawm ultrafine hais yog industrialized (ULVAC lag luam). Patented rotating magnetron cylindrical cathode (Mckelvey); Titanium teb dav hlau dav hlau ntaus tswv yim zoo tsim (TicoTitanium).

Nyob rau hauv 1983, kev tshawb fawb txog kev ua tshuaj lom neeg los ntawm kev sib ntaus sib tua (Lincoln, Geis li al.); Lub hom phiaj cylindrical magnetron sputtering lub hom phiaj tau tsim tau zoo heev (Robinson). High-density optical disc (Phillips, Sony); Industrialization ntawm cov khoom siv rau kev sib nqus rau hlau nplaum (Leybold); Metallization zoo mesh yog tsim thaum nqus tsev ntawm evaporation tsam hloov tas li (Galileo tuam txhab).

1984 daim phiaj plating ntawm cov yeeb yaj duab photovoltaic (lub tshuab hluav taws xob).

Nyob rau hauv 1985, lub tshuab nqus tsev ntawm cov films multilayer polymer tau yog patented (GE). Xyoo 1986, kev tshawb fawb ntawm non-equilibrium magnetron sputtering (Qhov rai, thiab lwm yam).

Laser tev dej tso ntawm HTS nyias zaj duab xis (Dijkkamp li al.); Lub tsev qhov chaw tsis muaj qhov chaw nyob yog qhov ua tau zoo heev (Kaufman, Robinson li al.). Xim inkjet luam ntawv (OCLI).

Nyob rau hauv 1988, ob-cathode medium feem ntau sputtering ion qhov tau ntse tsim (Este li al.). Industrialization ntawm dc cylindrical rotating magnetron sputtering tshuab (BOCCT); Lub siab txoj kev poob siab rau kev tswj cov kev nyuab siab ntawm cov yeeb yaj kiab tau zoo tau tsim (Cuthrell, Mattox).

Nyob rau hauv 1989, lub kotolz haumxeeb zaj duab xis tawm, tam sim no feem ntau hu ua CP zaj duab xis.

Nyob rau xyoo 1990, dual-ac yog magnetron tshuab ua kom tshuab txav ua tiav (Leybold); Kev loj hlob ntawm nplua mesh txheej khoom rau kev ruaj ntseg txee ruaj ntseg (ULVAC lub tuam txhab); Lub rooj sib zog rau kev nplua lo lus zoo tau tsim tau zoo (Leybold); Lub sij hawm luv luv reactive sputtering deposition txheej txheem ntawm alumina tau ntse tsim (Leybold lub tuam txhab).

Nyob rau hauv 1991, acrylic polymer txheej twb ntse applied. ZrN kho kom zoo nkauj zaj duab xis industrialization (Leybold).

Nyob rau hauv 1993, cov khib nyiab txheej tshuab tau patented (Gillette lub tuam txhab);

Nyob rau hauv 1995, silicon oxide barrier film yog patented (BOCCT lag luam); Ib lub koom txoos hauv internet tau siv lub tshuab ua kom muaj pa taws (Leybold).

Nyob rau hauv 1997, cov acrylic polymer txheej tshuab yog renamed delta technology; TaN thiab Cu tau plated ntawm silicon los ntawm lub cev vapor deposition (IBM). Kev loj hlob ntawm kev lag luam tawm ntawm cov yeeb yaj kiab (Leybold).

Nyob rau hauv 1998, cov khoom siv khawb rau cov khoom siv nrog cov xim filthiab tau muab tso rau hauv ntau lawm (Gillette lub tuam txhab).

Nyob rau hauv 1999, delta V tshuab rau cheeb tsam loj ntawm iav longitudinal txheej.