PVD Nqus tsev: evaporation yob rau cov khoom siv khi hlua khi
Nov 01, 2018| PVD Nqus tsev: evaporation yob rau cov khoom siv khi hlua khi
Winding nqus txheej tshuab tau ua kom loj hlob zoo rau yav dhau los 30 xyoo. Cov khoom uas muaj txheej txheem yog siv dav hauv kev kho kom zoo nkauj, ntim, lub lag luam thiab lwm cov hauj lwm, thiab muaj peev xwm muab co nrog optical, hluav taws xob, electromagnetic thiab conductive films. PE, tsiaj, PI, PP, OPP, BOPP, ntawv, ua npuas dej thiab ntaub siv. Feem ntau, cov dej ntsiab lus ntawm cov khoom siv yas duab yas yog 1% ~ 2%, thiab daim ntawv muaj dej ntau dua, uas feem ntau yog 5% ~ 7%. Tom qab qhuav los ntawm txheej, cov dej ntsiab lus tseem yog 3%. Vim lub siab dej cov ntsiab lus ntawm substrate, lub txheej chamber tsim los ntawm thawj zaug ib chav dav dav mus rau tam sim no ob los yog multi-Chamber qauv. Evaporation cov chaw yuav ua tau resistive, inductive, hluav taws xob thiab magnetron sputtering. Ob chav-Chamber qauv yog dav siv, thiab nws cov zoo yog: daim ntawv substrate yuav steamed thiab plated nrog ib tug loj npaum li cas ntawm huab cua tawm, thiab qhov zoo kawg nkaus yuav tsum tau guaranteed. Ib qhov roj loj heev ntawm daim ntawv tuaj yeem ntws los ntawm chav xoom. Raws li qhov sib txawv ntawm lub npub chamber thiab cov evaporating chamber yog qhov tsawg heev, qhov roj tawm raug tsis yooj yim nkag mus rau hauv chav tsev evaporating. Ib qho loj hauv lub raj cua yuav tsum muaj nyob rau hauv ib leeg-Chamber qauv los lav lub zog ua haujlwm thaum lub sijhawm evaporation, txawm tias cov pa roj tsawg zog hauv chav siv ob lub thawv tuaj yeem nruab nrog lub twj tso me me kom txo cov nqi khoom siv thiab txuag hluav taws xob. Lub chav winding thiab chav tsev evaporation yog cais pumped, uas yuav luv lub sij hawm siv zog.
Lub tshuab nqus cov tshuab nqus tau muaj lub tshuab ua haujlwm kom paub tseeb tias yuav tsum muaj kev sib nrauj tshwj tsis yog rau tag nrho cov qauv ntawm lub dav dav dav dav. Raws li cov coated substrate yog daim ntawv los yog yas nrog huab cua tso tawm, cov qauv ntawm lub tshuab nqus tsev yog muab faib ua ib qho chamber thiab ntau lub rooj. Tus qauv ntawm tus winding ob chav chamber nqus plating tshuab yog muaj nyob hauv daim duab 10-10.
Muaj ob peb yam teeb meem uas yuav tsum tau xav txog nyob rau hauv tus tsim ntawm txoj hlua tshuab:
1. Los txhim kho kev tsav ceev. Lub caij winding yog txoj kab ceev ntawm lub vias kab sab nraud txav. Nws yog ib qho tseem ceeb ntawm kev siv tshuab hluav taws xob. Lub caij winding ceev ntawm lub qub txheej tshuab tsuas yog 10m / min, thiab tam sim no nws tsuas yog 80m / min ~ 120m / min. Ntawm cov teb chaws EW khoom muag ntawm Nyiv, qhov kev sib tw ceev tau nce mus txog 300m / min, Yelemees L. Qhov txheej tshuab uas ua los ntawm H lub tuam txhab tau mus txog 600m / min. Nws tuaj yeem pom tau tias nrog txoj kev loj hlob ntawm cov txheej tshuab, qhov kev khav nyiab yuav tsum tau kho.
2. Qhov teeb meem ntawm qhov ncaj qha tawm ntawm kab txaij tawm. Qhov teeb meem no tseem ceeb heev vim hais tias tsuas winding mechanism yuav lav lub xuaj hlau ceev ceev ntawm lub strip substrate, thiaj li hais tias txheej thickness ntawm substrate yuav ua tau uniform. Qhov no yog qhov tshwj xeeb tshaj yog rau kev npaj rau lub cev (xws li lub plhaub taum capacitor) rau txav substrates.
3. Qhov teeb meem ntawm kev sib txawv thiab crimp ntawm seev cev substrates. Nrog txoj kev txhim kho ntawm kev ceev winding, lub strip substrate yuav deflected thiab deflected nyob rau hauv tus txheej txheem ntawm winding txheej, uas yuav tiag ua rau tawg ntawm lub substrate thiab cuam tshuam qhov ntau lawm, uas yuav tsis tsuas cuam tshuam cov efficiency efficiency, tab sis kuj cov khoom siv khib nyiab. Yog li no, qhov teeb meem no yuav tsum muab xam rau hauv tus qauv tsim ntawm txoj kev lag luam.
Lub tshuab nqus tsev extraction ntawm coiling film tshuab muab faib ua ob pawg: lub chamber sab saud thiab sab hauv qab. Lub chav sab saud yog lub hauv paus txheej txheem ntawm chav tsev, uas yuav tsum muaj qhov khoom nqus nqus tsev, thiab yog lub tshuab raj rotz lossis lub tshuab raj rotz thiab lub tshuab fais fab. General vacuum evaporation chamber mus txog 1 x 10 pa ^ - 3-2 x 10 ^ - 3 pa, ua haujlwm siab yog 1 x 10 ^ - 2 pa - 2 x 10 ^ 2 pa, thiab lub nqus yog feem ntau qhov kev txiav txim ntawm qhov siab qis dua evaporation chamber. Qee lub sij hawm coiling coating tshuab yog mas siv raws li cov twj tso kua mis augmentation (ib hom roj diffusion twj). Txawm hais tias nws qhov kawg siab tsis zoo li ntawm cov roj diffusion twj, nws qhov kev ceev ceev ntau yam txuas mus rau kev taw qhia ntawm kev kub siab los ntawm qhov kev txiav txim ntawm qhov ntau, uas yog haum rau cov txheej txheem evaporation txheej txheem.
Tam sim no, crucible yog siv los ua evaporate feem ntau ntawm evaporation qhov chaw ntawm winding zaj duab xis plating tshuab hauv Suav teb, thiab nws cov khoom muaj xws li boron nitride, graphite, molybdenum, thiab lwm yam. Vim nws zoo hluav taws xob thiab thermal thiab lub neej ntev kev pab, boron nitride dav siv nyob rau hauv coiling txheej tshuab. Qhov cua sov ntawm txhua crucible yog 6kW - 8kW, thiab qhov cua sov qhov hluav taws xob yog 10V - 12V. Tus naj npawb ntawm crucible yog txiav txim siab los ntawm dav ntawm substrate. Lub dav dav qhov dav qhov crucible ntau. Plaub crucibles ntawm 500mm dav, 7 ntawm 800mm thiab 12 ntawm 1300mm. Lub tis ntawm crucible tsis yog tsoos, qhov nruab nrab yog ntau spaced, thiab lub spacing yog me me ntawm ntug ntawm substrate. Qee cov txheej txheem qis tshaj plaws uas muaj kev sib tshooj nrog cov dav ntawm substrate.
IKS PVD customized lub haum PVD nqus txheej tshuab rau koj, sib cuag nrog peb tam sim no,
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