Dab tsi yog cov kev ua thiab kev ua qauv rau Evaporation nqus txheej tshuab?
Jan 29, 2019| Dab tsi yog cov kev ua thiab kev ua qauv rau Evaporation nqus txheej tshuab?
IKS PVD kev siv tshuab, hu rau peb tam sim no, iks.pvd@foxmail.com
I. kev xav tau ntawm cov qauv
1, cov qauv ntawm cov cuab yeej yuav tsum tsim nyog tsim teeb, zoo nkauj zoo, yooj yim rau kev khiav lag luam, yooj yim kom muaj.
2. Cov qauv thiab qhov loj ntawm cov ruaj ntseg zoo li qub thiab cov khoom siv hauv cov khoom yuav tsum ua raws li cov kev cai ntawm GB / T 6070 thiab JB / T 1090 ~ 1092.
3. Lub tshuab nqus tsev vacuum yuav tsum tau muab tso rau ntawm lub tshuab nqus cov qis thiab siab thiab lub txheej chamber los ntsuas qhov siab ntawm nyias qhov nyias.
4. Yog tias lub tshuab nqus tsev ntawm lub cuab yeej siv los ntawm lub tshuab fwj diffusion, yuav tsum tau txhim khu los yog txias txias ntawm lub qhov hluav taws xob ntawm lub tshuab diffusion.
5, lub chav tsev yuav tsum muaj qhov kev soj ntsuam qhov rai, rau txheej txheem cov khoom siv hluav taws xob, qhov kev soj ntsuam yuav tsum tau nruab nrog lub iav tsom iav.
6, nrog cov khoom ua haujlwm ci tej cuab yeej siv, yuav tsum ntsuas kub ntsuas electrode lossis ntsuas kub ntsuas.
7, txoj kev sib hloov ntawm kev ua hauj lwm los ntawm kev ua hauj lwm yuav tsum ua kom tau raws li cov khoom tsim.
8. Cov khoom siv uas muaj kev sib txheeb rau txoj kev sib tsoo lossis kev sib tsoo ntawm qhov chaw nqaj qes hluav taws xob tsawg yuav tsum ua haujlwm tau zoo thiab ruaj khov rau ntau tshaj 30 feeb hauv cov kev txwv uas teev hauv cov qauv tsim cov khoom.
9. Lub rhaub nrog cov tungsten hlau raws li cov evaporation cua sov los yuav tsum tau ua kom evaporation ntawm cov ntaub ntawv evaporation zoo li qub, thiab nyob rau hauv cov txheej txheem evaporation, lub rhaub dej ntsuas yuav tsum tsis txhob cuam tshuam rau qhov qub evaporation.
10. Cov khoom evaporation ntawm lub cuab yeej yuav tsum ruaj khov thiab yooj yim kho thiab tswj. Cov ntaub ntawv tsim nyog rau ntau qhov chaw evaporation (xws li cov evaporation qhov chaw, hluav taws xob nqaj evaporation, qhov chaw ion beam evaporation, sources evaporation laser, inductive evaporation sources, thiab lwm yam) yuav tsum tau muab teev cia raws li cov khoom tsim nyog.
11. Thaum twg cov cuab yeej siv lub zog tsawg thiab siab tsis sib luag, cov khoom cua no yuav tsum ua hauj lwm hauv lub xeev 4 volt ~ 20V thiab tam sim no 50A ~ 180A.
Ii. Kev tsim cov cai
1. Kev ua haujlwm zoo, kev siv vuam zoo thiab sib dhos zoo ntawm cov khoom thiab cov khoom ntawm cov khoom yuav tsum ua raws li cov kev cai ntawm cov chaw tsim khoom cov ntaub ntawv.
2. Roughness Ra tus nqi ntawm sab hauv tsev ntawm cov khoom siv lo thiab sealing qhov yuav tsum tsis pub tshaj 1.6um, thiab txhua qhov chaw hauv lub tshuab nqus tsev yuav tsum raug muab ntxuav thiab qhuav los ntawm lub tshuab nqus tsev. Txhua txoj kev ua haujlwm, kev txhawb zog thiab lwm yam kev ua haujlwm yuav tsum tau yooj yim, tsis nyam, stagnation, xoob, tuav thiab txawv txav tsis zoo, thiab lwm yam.
3. Cov khoom ntawm qhov tseem ceeb thiab cov khoom ntawm cov khoom siv yuav tsum ua raws li cov qauv ntaub ntawv.
4. Qhov zoo ntawm cov khoom siv hluav taws xob txhawb siab yuav tsum ua raws li cov ntaub ntawv pov thawj ntawm cov khoom siv, thiab ua kom muaj kev ruaj ntseg thiab kev ntseeg ntawm cov khoom siv hauv kev lag luam thiab kev lag luam.
5. Cov tsos zoo ntawm lub cuab yeej yuav tsum yog tsis pub dawb los ntawm kev ua haujlwm tsis zoo xws li ntse pob, ntug, qhov ncauj thiab qhov chaw txoos. Qhov ntug ntawm qhov sib npaug ntawm qhov chaw yuav tsum zoo huv thiab txawm tias tsis muaj kev pom tsis meej. txheej, tsis muaj lub caij poob thiab xeb thiab lwm yam tshwm sim, tag nrho cov qhov muaj zog yuav tsum muaj xeb txheej.Tus txheej nplais ntawm lub cuab yeej yuav tsum ci thiab huv, zoo nkauj, ruaj, tsis muaj shedding, chiv thiab lwm yam tshwm sim.
6. Cov khoom siv ntawm cov khoom siv yuav los ntawm cov khoom siv yuav tsum ua raws cov qauv ntawm cov khoom tsim nyog thiab yuav tsum muaj cov ntawv pov thawj zoo dua. Cov khoom pab khoom siv rau cov khoom siv hauv cov khoom siv tsuas yog siv tom qab kev tshuaj xyuas los ntawm chav soj ntsuam ntawm cov chaw tsim tshuaj.
7. Kev sib txawv ntau yam evaporation, qhov chaw pabcuam ion thiab ion bombardment, workpiece rotation, workpiece baking, workpiece bias, film thickness xyuas thiab lwm yam khoom nyob rau hauv cov cuab yeej.Nws - los - khoom debugging thiab sib koom tes debugging yuav tsum tau nqa tawm.Thaum lub workpiece rhaub kom kub, qhov nqus sab nraum qhov chaw ntub yuav tsis siab tshaj 45 degree, thiab qhov tsiv ntawm lub cuabyeej yuav tsum ua haujlwm zoo li qub.