Electron Beam Evaporation

Electron nqaj evaporation

Evaporation Technology - Electron Beam Evaporation

Lub tshuab nqus tsev Txheej Txheem Txheej Txheem: Ib qho txheej txheem uas muaj cov khoom tsim tawm hauv qhov chaw siab nqus siab los sublimate los yog evaporate thiab deposit rau ib qho substrate kom tau ib zaj duab xis.

Lub tshuab nqus tsev evaporation classification:

Resistance thermal evaporation

2. Cov hluav taws xob ev evaporation

3. Kev nqus cov pa khov no ntev

4. Laser teeb meem evaporation

Ib qho uas feem ntau siv ua kom cua sov evaporation yog los tso rau cov khoom siv los ua cua sov, thiab lub cua sov kuj nyob hauv cov khoom siv hluav taws xob rau cov cua kub kom qhuav tau cov khoom siv kom muab tso rau. Nyob rau hauv hom no, feem ntau yog siv cov cua sov cov khoom siv hluav taws xob tsis zoo xws li tungsten, tantalum thiab molybdenum, tag nrho cov uas muaj qhov kub ntxhov siab thiab cov yam ntxwv tsis tshua muaj zog ntawm vapor. Cov khoom siv pab txhawb cua sov feem ntau yuav siv daim ntawv pov thawj los yog ntawv ci.

Raws li qhia, lub cua sov ntaus ntawv yog ua los ntawm nyias tungsten / molybdenum hlau (0.05-0.13 cm nyob rau hauv lub cheeb). Cov evaporant yog tso ncaj qha rau ntawm lub tshuab cua kub cua. Thaum rhuab, cov evaporant ntub lub xaim xaim thiab txhawb los ntawm kev nruj nruj. Ib txoj kab hlau uas muaj ntau lub strands muab thaj tsam loj dua li ib zaug xwb. Hom kab mob cua sov no muaj plaub qhov teeb meem loj:

(1) Lawv tsuas yog siv tau rau cov evaporation ntawm hlau lossis qee cov txhauv tawm:

(2) Tsuas yog cov khoom siv ntawm cov khoom evaporated nkaus xwb yog nyob rau lub sij hawm ib ntus:

(3) Thaum cua sov, cov khoom siv evaporation yuav tsum ntub cov tsis xaim hluav taws xob:

(4) Thaum rhuab, cov fais fab fais fab no ua rau nkig thiab yuav tawg yog tias tsis ua haujlwm zoo.

Cov ntaub nplaum yog sau los ntawm ib daim ntawv ntawm tungsten, tantalum lossis molybdenum thiab muaj ib qho tuab ntawm feem ntau ntawm 0.005 txog 0.015 ntiv. Qhov no evaporation qhov chaw ntaus ntawv yog tsim rau thaum muaj tsuas yog ib qho me me ntawm cov khoom siv evaporation. Thaum rhaub nyob hauv lub tshuab nqus tsev, tungsten, tantalum los yog molybdenum yuav txhav, tshwj xeeb tshaj yog thaum twg lawv muaj alloyed nrog cov khoom evaporation.

Qhov tsis zoo ntawm hluav taws xob hluav taws xob ua kom tsis muaj zog evaporation yog:

(1) Cov kev pab cuam crucible thiab cov khoom ua muaj mob nrog cov evaporant.

(2) Nws tsis yooj yim kom tau txais qhov kub txaus kom txaus rau cov khoom siv dielectric xws li A1203, Ta2O5, TiO2, thiab cov zoo li no.

(3) Tus nqi evaporation tsis txaus.

(4) Cov phom los yog cov chaw yuav tsim tawm thaum lub ntsuas sov.

Cov kab hluav taws xob evaporation: Ib txoj hauv uas siv cov khoom siv evaporation tso rau hauv cov dej txias, thiab ncaj qha los ntawm cov hluav taws xob electron kom vaporize cov evaporation khoom thiab condense ntawm lub substrate los ua ib zaj duab xis nyias.

Qhov tsis zoo ntawm kev ua kom cua sov yog tias txoj kev tsis haum rau evaporation ntawm high-purity los yog high-melting tshuaj, thiab electron beam evaporation yuav kov yeej qhov deficiency ntawm cov evaporation, thiab yog li electron beam cua sov tau ua evaporation high-melting zaj duab xis thiab siab purity. Ib txoj kev loj ntawm zaj duab xis. Nyob rau hauv electron beam evaporation technology, ib tug nqaj ntawm electrons yog ceev tom qab dhau ib lub teb hluav taws xob ntawm 5-10 kV.

Thaum kawg tsom ntawm qhov chaw ntawm cov khoom yuav tsum tau evaporated. Thaum cov nplaim hluav taws hits hos ntawm cov khoom yuav tsum tau evaporated, cov electrons yuav poob sai dua lawv lub zog, hloov lub zog rau cov khoom siv rau yaj thiab yaj, uas yog, qhov chaw ntawm cov khoom yuav tsum tau evaporated yog ncaj qha rhuab los ntawm kev sib tsoo hluav taws xob electron. Cov cua sov txoj kev yog txawv.

Txij li thaum cov khoom siv rau hauv txuam nrog cov pob zeb uas muaj cov khoom siv los ua kom tsis tshua muaj nyob thoob hauv lub evaporation deposition txheej txheem, tseem muaj cov khoom yuav tsum tau ua rau cov pa taws ua rau cov pob zeb no tau qis dua. Evaporation ntawm cov ntaub ntawv hauv cov dej-txias crucibles ncaj qha los ntawm electron nqaj cua sov cua sov yog ib qho qauv hauv hluav taws xob nqaj evaporation. Rau evaporation ntawm active cov ntaub ntawv, tshwj xeeb tshaj yog active refractory cov ntaub ntawv, dej txias ntawm crucible yog tsim nyog. Los ntawm cov dej txias, qhov tshuaj tiv thaiv ntawm cov khoom siv evaporation thiab cov phab ntsa yuav raug pov tseg, uas yog cov yeeb yaj kiab purity siab npaj tau.

Nyob rau hauv electron ci beam evaporation system, tus ntaus ntawv uas generates electron beam ua ib rab phom electron. Raws li qhov sib txawv hauv cov qauv, cov phom tua hluav taws yuav muab faib ua ib rab riam phom, rab phom ncaj, thiab siv e-phom.

Lub nplhaib rab yaj zeeg tawm ib txoj hlua ntawm electron ntawm lub nplhaib ntawm lub nplhaib, uas yog deflected ntawm lub nplhaib cathode thiab ces hits tus 坩 (

Cov khoom no yog yaj ua ev tshuaj nyob rau hauv qhov anode) raws li tau qhia hauv seem ntawm tus qauv. Ntiv nplhaib phom hom qauv yooj yim, nqi

Tsawg, yooj yim siv. Txawm li cas los, vim hais tias cathode ntawm lub nplhaib rab phom yog heev ze rau qhov anode, nws yog ib qho yooj yim mus ua txhaum.

Lub xaim kuj tau paug tau yooj yim; tib lub sij hawm, qhov chaw ntawm txoj hlua ntawm electron yog tsau, thiab nws yog qhov yooj yim tuaj tshwm

Pit "Evaporation Vim tias lub zog thiab kev ua haujlwm ntawm lub nplhaib tsis yog siab, nws tau siv tsawg dua.

Zoo: cov qauv yooj yim, luv nqi thiab yooj yim siv

Disadvantages: Filament yooj yim yoj ua pa

Cov teebmeem fixation yog nws qhov chaw "pit" evaporation

Lub zog thiab kev ua haujlwm tsis yog siab

Ib rab phom ncaj yog rab phom axisymmetric linear acceleration. Cov nqaj hlau electron tawm ntawm cov cua kub cua kub ceev los ntawm lub anode thiab ces tsom los ntawm ib thaj chaw sib nqus, thiab tom qab ntawd nrog rau cov khoom siv hauv pob zeb thiab yaj cua. Ntawm lawv, qhov kev nqis tes ntawm xy deflection kauj Nws yog ua rau cov tsom iav electronics tsiv mus nyob rau hauv ib chav me me, yog li ntawd qhov chaw ntawm qhov chaw ua kom pom tseeb yuav raug kho.

Zoo: siv tau yooj yim; dav fais fab ntau (ntau pua watts mus rau ntau pua lub qhuav watts) yooj yim los kho

Tsis zoo li qub: Cov khoom tsis zoo, cov qauv yog complex, thiab tus nqi yog siab: evaporation ntawm lub zos khoom yuav pollute tus qauv ntawm lub phom lub cev, thiab sodium ions escaping ntawm lub ntsiab lus yuav ua rau zaj duab xis los tsuas.

Lub e-phom yog ib hom hlau uas xuas hluav taws xob tua deflect electronics ntawm 270 ° thiab yog npe tom qab electron trajectory yog "e" zoo li.

Cov nqaj hlau electron tshem tawm ntawm lub ntsiab lus yog accelerated los ntawm kev sib thab qhov siab ntawm ntau txhiab volts thiab khawm

Tom qab lub teb chaw magnetic deflected los ntawm 270 ° , cov khoom siv rau hauv cov khoom pov tseg yog khib nyiab rau yaj thiab evaporate.

Zoo: Txwv tsis txhob muaj cov khoom pov thawj los ntawm cov khoom siv evaporation thiab cov dej paug ntawm cov phuam

Muaj hwj chim loj (li 10kW). Cov kabmob ua tau zoo tshaj plaws

Lub zog ntawm evaporating hais yog siab, lub adhesion ntawm zaj duab xis mus rau lub substrate yog loj, thiab zaj duab xis tsim zoo yog zoo.

Disadvantages: Yuav tsum muaj lub tshuab nqus tsev siab, thiab cov khoom siv hluav taws xob siab yuav tsum tau ua. Tus qauv ntawm cov cuab yeej yog qhov nyuaj, nws yog qhov nyuaj rau kev tswj hwm, thiab cov cuab yeej cuab tam tus nqi siab zog.

Qhov zoo ntawm cov hluav taws xob nqaj evaporation yog raws li nram no: (1) Nws tuaj yeem ua kom sov cov khoom ua kom qhuav, txo cov cua sov, thiab muaj cua sov ntau dua: (2) Lub zog qhov hluav taws xob generated ntawm tus hlau nqaj loj yog qhov loj, melting point (ntau dua 3000 ° C) tuaj yeem ua kom qhuav. , thiab muaj ntau npaum li cas evaporation: (3) Cov pob zeb uas muaj cov khoom siv evaporation yog txias los yog txias nrog dej, uas tuaj yeem tsis txhob muaj cov khoom pov tseg ntawm cov khoom siv evaporation thiab cov evaporation ntawm lub thawv khoom, qhov no ua kom zoo dua qub.

Cov kev tsis zoo yog raws li nram no: (1) Cov cua kub twj ywm nyuab: (2) Cov roj ntsha nyob rau hauv qhov chaw ncaj thiab qhov ua pa ntawm cov khoom siv evaporated los ntawm electron beam, uas yuav cuam tshuam rau tus qauv thiab lub zog ntawm zaj duab xis.

IKS-OPT2700 yog lub tshuab Beam evaporation txheej cav, txhua lo lus nug, hu rau: iks.pvd@foxmail.com