Glow Discharge Thiab Arc Discharge Characteristic Comparison

Glow discharge thiab arc tawm cov yam ntxwv sib piv

Table 3 qhia txog kev sib piv ntawm cov yam ntxwv tawm ntawm glow discharge thiab arc tawm. Nws tuaj yeem nkag siab tias PVD thiab CVD txhim kho arc tawm txheej tshuab vim tias arc tawm tuaj yeem txhim kho cov ntshav ceev hauv txheej txheem txheej.

▲ Table 3 Glow discharge thiab arc discharge yam ntxwv sib piv lub rooj

Nws tuaj yeem pom los ntawm Table 3 tias qhov tso tawm tam sim no qhov ntom ntom ntawm arc tawm ntau dua li qhov ci ntsa iab, uas ua rau cov atoms ntawm cov hlau zaj duab xis txheej rau ionize rau ntau ions, uas tau nyiam los ntawm qhov tsis zoo ntawm cov khoom ua haujlwm. ceev mus rau lub workpiece thiab ua high-zog zaj duab xis hais.

Chav tsev ntawm lub zog ntawm ib qho ion yog electron volt, denoted los ntawm "eV". Nws muaj feem xyuam rau qhov kub thiab txias hauv cov qauv hauv qab no, 1eV sib npaug rau lub zog ntawm cov khoom no ntawm 11600K.

1 ev khoom 1.16 x 104 k

Nyob rau hauv lub tshuab nqus tsev vacuum thiab kub CVD tshuab, qhov kub ntawm cov zaj duab xis hais txog lub workpiece yog 1000K ~ 2000K, thiab nws lub zog yog sib npaug rau 0.1eV ~ 0.2eV. Txawm li cas los xij, lub zog ntawm ions mus txog qhov chaw ua haujlwm hauv ion plating nruab nrab zaj duab xis tuaj yeem mus 1eV ~ 100eV, thiab nws tus kheej qhov tseem ceeb yog siab heev, thiab nws yooj yim rau kev tso cov yeeb yaj kiab sib xyaw. Qhov kub ntawm TiN deposition los ntawm PVD poob ntawm 1000 degree mus rau 500 degree ~ 200 degree.

IKS PVD tuam txhab, kho kom zoo nkauj txheej tshuab, cuab yeej txheej tshuab, DLC txheej tshuab, kho qhov muag txheej tshuab, PVD nqus txheej kab, txoj haujlwm tig-key yog muaj. Hu rau peb tam sim no, E-mail: iks.pvd@foxmail.com