Kev cuam tshuam ntawm Magnetron Sputtering Process Parameters: Target-base Distance
Sep 04, 2024| Kev cuam tshuam ntawm magnetron sputtering txheej txheem tsis: phiaj-puag nrug
Cov tshuaj muaj pes tsawg leeg thiab cov qauv ntawm (Cr, Ti, Al) N quaternary txheej tuaj yeem hloov kho los ntawm kev hloov qhov kev ncua deb ntawm lub hom phiaj thiab substrate, thiab ntau yam khoom ntawm txheej tuaj yeem cuam tshuam. Jin Li et al. siv kaw teb tsis-equilibrium magnetron sputtering tshuab rau deposit (Cr, Ti, Al) N txheej ntawm H13 steel matrix, thiab kawm thiab soj ntsuam cov thickness, muaj pes tsawg leeg thiab cov khoom ntawm (Cr, Ti, Al) N quaternary coatings nyob rau hauv txawv lub hom phiaj- puag ncig (80 ~ 180 mm) [61]. Cov txiaj ntsig kev sim qhia tau hais tias nrog qhov nce ntawm lub hom phiaj-piv qhov deb, qhov sib nqus ntawm qhov sib nqus yuav txo qis sai, thiab ion tam sim no ntom kuj yuav txo qis, uas yuav ua rau txo qis ntawm deposition npaum li cas thiab txheej thickness. Tsis tas li ntawd, nrog rau qhov nce ntawm lub hom phiaj-piv qhov deb, cov ntsiab lus ntawm cov ntsiab lus hlau hauv (Cr, Ti, Al) N txheej txo qis tsis tu ncua, thaum cov ntsiab lus ntawm cov ntsiab lus nitrogen nce tsis tu ncua. Lub microhardness ntawm txheej txheej thiab zaj duab xis-puag khi quab yuam tau nce ua ntej thiab tom qab ntawd txo qis. Txawm li cas los xij, qhov hnav ntim thiab hnav tus nqi ntawm cov txheej txheem txo qis ua ntej thiab tom qab ntawd nce, uas yog, hnav tsis kam ntawm txheej tau nce ua ntej thiab tom qab ntawd txo. Qhov no yog vim lub hardness thiab binding quab yuam ntawm lub txheej muaj ib qho tseem ceeb cuam tshuam rau nws kev sib txhuam thiab hnav zog. Qhov qis dua ntawm zaj duab xis-puag khi quab yuam, qhov ntau dua cov txheej yog tawg thiab flake thaum sib txhuam, yog li txo qhov hnav tsis kam ntawm txheej.
IKS PVD tuam txhab, kho kom zoo nkauj txheej tshuab, cuab yeej txheej tshuab, DLC txheej tshuab, kho qhov muag txheej tshuab, PVD nqus txheej kab, txoj haujlwm tig-key yog muaj. Hu rau peb tam sim no, E-mail: iks.pvd@foxmail.com