Cov khoom siv PECVD cov teeb meem tshwm sim-Kev ua yeeb yaj kiab tsis zoo
Jul 03, 2023| Cov khoom siv PECVD cov teeb meem tshwm sim-Kev ua yeeb yaj kiab tsis zoo
(1) Cov qauv ntawm qhov chaw huv si tsis zoo, xyuas seb cov qauv saum npoo puas huv.
(2) Kev huv ntawm cov txheej txheem chamber tsis zoo, thiab cov txheej txheem chamber raug ntxuav.
(3) Yog tias tus qauv ntsuas kub tsis zoo, xyuas seb lub ntsuas kub tswj qhov system puas zoo li qub thiab ntsuas qhov ntsuas kub ntsuas thermocouple.
(4) Lub siab tsis zoo nyob rau hauv cov txheej txheem ntawm cov zaj duab xis deposition, xyuas cov leakage rate ntawm lub tshuab nqus tsev vacuum system.
(5) Yog tias lub hwj chim RF raug teeb tsa tsis raug, xyuas RF fais fab mov thiab kho lub zog teeb.
IKS PVD tuam txhab, kho kom zoo nkauj txheej tshuab, cuab yeej txheej tshuab, DLC txheej tshuab, kho qhov muag txheej tshuab, PVD nqus txheej kab, txoj haujlwm tig-key yog muaj. Hu rau peb tam sim no, E-mail: iks.pvd@foxmail.com
