Sputtering Deposition Txheej

Sputtering depositiontxheej

Thaum lub zog hluav taws xob loj yog cov nplaim hluavtaws hauv qhov chaw, cov lus hais ntawm qhov chaw ruaj khov tuaj yeem tau txais lub zog thiab kev khiav tawm ntawm cov nplaim thiab tso nyiaj rau hauv txheej. Qhov tshwm sim sputtering pib siv nyob rau hauv txheej txheej thev naus laus zis xyoo 1870, thiab tom qab xyoo 1930, nws tau maj mam siv rau hauv kev lag luam ntau lawm vim tias qhov kev nce ntawm kev tso nyiaj tsawg. Feem ntau, cov khoom yuav tso yog tsim rau hauv lub phaj─ phiaj─ thiab tsau rau ntawm cathode. Lub pob hauv qab yog tso rau lub anode ncaj qha sib tw ntawm lub hom phiaj, ob peb centimeters deb ntawm lub hom phiaj. Tom qab lub zog xa mus rau lub tshuab nqus tsev siab, 10 ~ 1 Pa roj (feem ntau argon) tau ntim lawm, thiab ob peb txhiab volts siv ntawm cathode thiab anode los tsim hluav taws xob tawm ntawm cov ncej. Cov ions zoo uas tsim los ntawm qhov tawm ya tawm mus rau cathode nyob rau hauv qhov kev txiav txim ntawm lub ntsuas hluav taws xob thiab sib tsoo nrog cov atoms ntawm lub hom phiaj saum npoo. Lub hom phiaj atoms khiav tawm ntawm lub hom phiaj nto los ntawm kev sib tsoo yog hu ua sputtering atoms, uas nws lub zog nyob ntawm 1 txog kaum ob ntawm hluav taws xob hluav taws xob. Cov kab laug sab (sputtering atoms) tau muab tso rau saum npoo ntawm cov substrate los ua ib zaj duab xis. Txawv los ntawm txheej txheej evaporation, txheej txheej ua kom tsis muaj txheej txheem tsis yog los ntawm qhov chaw yaj ntawm zaj duab xis cov khoom siv, thiab tuaj yeem yauv W, Ta, C, Mo, WC, TiC thiab lwm cov ntaub ntawv refractory. Lub tshuab ua kom sib xyaw ua ke tuaj yeem siv los ntawm cov txheej txheem kev txhaws, uas hauv cov pa roj (O, N, HS, CH, thiab lwm yam) ntxiv rau Ar roj, thiab cov pa roj thiab nws cov ions react nrog phiaj atoms lossis sputtering atoms rau tsim cov khoom sib txuas (xws li oxides, nitrides, thiab lwm yam), uas tau muab tso rau ntawm lub khob av. Kev kub ceev ntu tuaj yeem siv tau los tso cov yeeb yaj kiab insulating. Cov txheej hauv qab yog nruab rau ntawm cov hluav taws xob hauv hluav taws xob hauv av thiab qhov chaw ntxig hluav taws xob yog ntsia ntawm cov hluav taws xob rov qab. Ib kawg ntawm HF fais fab mov yog lub hauv paus, thiab lwm qhov kawg tau txuas nrog lub tshuab hluav taws xob uas muaj qhov ntxig hluav taws xob los ntawm kev sib txuas ntawm cov network thiab cov DC tam sim no muaj peev xwm. Tom qab lub qhov hluav taws xob loj tau hloov kho lawm, lub siab siv hluav taws xob tas li hloov nws lub polarity. Cov hluav taws xob thiab cov ions zoo hauv lub plasma ntaus lub hom phiaj insulating hauv qhov zoo thiab tsis zoo ib nrab ntawm qhov voltage, feem. Vim tias hluav taws xob hluav taws xob muaj qhov siab dua li ntawm cov ions zoo, qhov chaw hom phiaj insulating yog qhov tsis zoo raug them. Thaum qhov sib luag ntawm qhov sib npaug tau nce mus, lub hom phiaj yog qhov tsis zoo yog qhov muaj peev xwm, yog li qhov sib dhos ntawm cov ions zoo ntawm lub hom phiaj txuas ntxiv mus. Kev siv magnetron sputtering tuaj yeem nce qhov kev tso nyiaj tsawg los ntawm ze li ib qho kev txiav txim ntawm qhov ntau piv nrog qhov tsis yog-magnetron sputtering.

IKS PVD tuam txhab, lub tshuab ua kom zoo nkauj, cuab yeej txheej tshuab, kho qhov muag txheej tshuab, PVD nqus plua plav txheej kab, qhov phiaj xwm ua haujlwm tseem ceeb muaj. Ua rau peb tam sim no, E-mail: {{2}