Qauv thiab Khoom Ntawm Pob Zeb Diam Tawv Zoo Li Films Ua Los Ntawm Nruab Nrab Zaus Pulsed Tub Ntxhais Kawm Ntawv Magnetron Sputtering Technology

Cov qauv thiab cov khoom ntawm pob zeb diamond zoo li cov duab ua los ntawm Medium zaus pulsed tsis muaj quas magnetron tshuab luam yeeb tshuab

Pob zeb diam duab zoo li (DLC) cov duab tau npaj tseg los ntawm yog hais tias tsis yog qhov sib txig sib txig ntawm cov nplaum iav, thiab qhov teeb meem ntawm kev ceev ceev ceev ntawm cov xim thaev duab, microstructure, mechanical zog thiab kho qhov muag. Kev ntsuas ntawm kev ua kom lub cev pom tau tias DLC zaj duab xis thickness nce nrog qhov nce ntawm kev tso dej siab. Cov duab xoo hluav taws xob photolcopy X-ray kuaj tau pom tias thaum lub siab ntsws muaj ntau dua ntawm 0.18Pa mus rau 1.50Pa, cov ntsiab lus ntawm sp3 hybrid cov roj hauv DLC zaj duab xis tsawg zuj zus nrog qhov nce ntawm kev tso dej siab. Cov kev tshwm sim ntawm nano indentation thiab ellipsometry xeem qhia tias nano hardness thiab refractive index ntawm DLC zaj duab xis txo nrog qhov nce ntawm deposition siab. Cov teebmeem ntawm kev tso dej siab rau kev loj hlob thiab tsevneeg ntawm cov yeeb yaj kiab nyias tau tshawb xyuas los ntawm ntiav txhaj tshuaj. Cov kev tshwm sim saum toj no qhia tau tias lub siab ntsaws ruaj ruaj muaj kev cuam tshuam zoo heev rau DLC zaj duab xis tuab, sp3 hybrid carbon cov ntsiab lus, txhua yam khoom siv thiab kho qhov muag.

(pob zeb diamond - zoo ib yam li cov DLC) thin film yog qhov tseem ceeb (sp3) muaj pob zeb diamond metastable amorphous, amorphous carbon cov ntaub ntawv, qhov kev kawm zoo ntawm daim nyias nyias yog zoo ib yam li pob zeb diamond, xws li kev sib zog, kev sib txhuam coefficient, tsis tshua muaj dielectric tsis tu ncua, muaj qhov sib txawv loj, infrared transmittance, ruaj ntseg tshuaj zoo thiab biocompatibility thiab zoo li, thiab muab piv nrog cov pob zeb diamond zaj duab xis kub tsawg, cov nuj nqis siab, cov membrane nto roughness me me, qhov zoo ntawm kev npaj yooj yim, muaj ib daim ntawv zoo hauv kev lag luam hauv tshuab ntawm tshuab, hluav taws xob, optics, tshuaj thiab cov khoom siv tiv thaiv corrosion.

Txij li thaum Aisenberg thiab Chabot ua ntej 1971 los ntawm Ion nqaj tso rau hauv chav tsev sov (Ion nqaj deposition IBD) tom qab npaj DLC cov yeeb yaj duab, tau tsim ntau hom kev npaj DLC yeeb yam, xws li hlau nplaum, cathodic nqus tsev tso rau hauv, cov pa roj carbon monoxide deposition, lub xov tooj cua zaus ntu, cov pa hluav taws xob vapor deposition method, electron cyclotron resonance chemical vapor deposition method, plasma pab tshuaj lom neeg vapor deposition method, xws li lub cev vapor deposition (PVD) thiab cov tshuaj vapor deposition (CVD).

Magnetron sputtering yog ib hom kev siv ntau tshaj plaws los npaj DLC cov yeeb yaj duab, nrog cov yeeb yam zoo xws li hom xim txheej, zoo ceev, zoo txheej txheem repeatability, siab nqus dej kub thiab qis dua substrate. Cov cuab yeej siv ntawm kev ua haujlwm tsis zoo ntawm cov hlau nplaum plab ua tsis zoo ntawm cov hlau nplaum plhu hauv xyoo tsis ntev los no, sib txuas cov txiaj ntsig ntawm kev ua rau cov plab hnyuv qaub thiab cov plhom tsis muaj hlau nplaum, thiab tau dav siv hauv kev kuaj thiab kev lag luam. Ntxiv rau qhov zoo ntawm cov hlau nplaum magnetron feem ntau cov deposition, qhov no yuav ua rau tshem tawm qhov tshwm sim ntawm cov paug tawm thiab lub hom phiaj, ua kom zoo dua qub, kev zoo thiab cov khoom ntawm zaj duab xis, thiab ua kom zoo dua rau ntawm zaj duab xis thiab cov substrate.

DLC zaj duab xis ua ke nyob rau hauv daim ntawv ntawm cov kev sib cog lus ntawm carbon atoms, cov tshuaj bonds yog cov sp2 thiab sp3 hybrid key tseem ceeb, ob theem ntawm ntau npaum li cas ib feem ntawm qhov kev ua tau zoo ntawm DLC zaj duab xis: cov ntsiab lus sp3 hybridization tseem ceeb dua, ntau ze ntawm qhov ntawm pob zeb diamond zaj duab xis, yog xim los ntawm daim ntaub thaiv tuab, siab tawv, zoo ua hauj lwm rau cov tshuaj muaj zog, qhov ntxi qhov dav thiab siab resistivity. Nrog ntau hom kev lag luam thiab cov tsis tau, cov ntsiab lus ntawm sp3 hybrid daim ntawv cog lus hauv DLC zaj duab xis sib txawv, thiab zaj duab xis cov kev ua haujlwm yuav txawv heev. Hauv daim ntawv no, cov duab xis pob zeb zoo li lawv tau npaj tseg los ntawm pulsed yog cov hlau nplaum magnetron. Cov teebmeem ntawm kev tso dej siab rau ntawm kev ua kom tuab tuab, cov qauv nyiaj txiag, cov khoom siv thiab cov khoom siv kho qhov muag.

1. Sim

Cov pob zeb diam duab zoo li DLC tau muab tso rau ntawm cov iav nplaum uas siv nruab nrab lub suab paj nruag (non-equilibrium magnetron sputtering technology), nrog graphite (purity 99.99%) raws li cov khoom siv thiab argon (purity 99.99%) raws li cov pa roj ua kom roj. muab tso rau hauv lub tshuab nqus tsev, nws xub ntxuav nrog acetone, anhydrous haus cawv thiab deionized dej los ntawm ultrasound rau 15min, thiab ces qhuav nrog infrared teeb thiab tso rau hauv lub tshuab nqus tsev vacuum.Molecular twj siv rau lub tshuab nqus tsev vacuum. Tom qab lub hnab nqus mus txog 5.0 10-4 Pa, argon tau txhaj tshuaj hloov cov khoom nqus nqus mus txog 2.0 Pa, thiab ib qho kev siv hluav taws xob tau siv ntxiv rau qhov tsis zoo dua 700V ntawm lub substrate rau kev ntxuav tsev rau 15min (lub luag hauj lwm ntawm 80% ) ntxiv tshem tawm impurities thiab roj molecules adsorbed nyob rau ntawm lub substrate, yog li zoo heev txhim kho rau lub xeev lub xeev.Nyob rau hauv zaj duab xis deposition txheej txheem, lub hom phiaj-pib nrawm yog 90 hli, lub hwj chim ntawm yog fais fab tuag yog 290 W, cov muaj 40 kHz, thiab cov voj voog ua haujlwm yog 80%, qhov kev siv hluav taws xob ntau yog 100V, qhov ntev yog 40 kHz, lub voj voog ua haujlwm yog 80%, qhov kub qhov kub thiab txias, thiab qhov tso quav siab yog 0.18 Pa , 0.36 tus, 0.72Pa, thiab 1.50 Pa, feem.

Vijtsam Deckak 150 kauj vab yog siv los ntsuas cov thickness ntawm DLC cov duab npaj. Kratos-xsam800 qhov tsom xam cov qauv siv rau qhov kev ntsuam xyuas X-ray Photoelectron spectroscopy (XPS) ntawm kev kuaj, siv 13 kV 19 mA Al X-ray (1486.6 eV), thiab qhov chaw pov thawj hauv chav tshuaj ntsuam yog siab tshaj li ntawm 1 10-6 Pa Nano-hardness xeem tiav rau ntawm MTS nano-indentation instrument (xp hom). Thaum lub sij hawm nano-indentation, 3 ntsiab lus ntawm txhua tus qauv raug coj mus kuaj, thiab ces tus nqi nruab nrab ntawm qhov nano-hardness ntawm cov ntsiab lus 3 tau npaum li nano-hardness ntawm txhua tus qauv. Cov kev kho qhov muag ntawm cov yeeb yam nyias tau ntsuas ntawm cov m-2000 di spectroscopic ellipsometer uas ua los ntawm JAW ollam nyob rau hauv Teb Chaws Asmeskas, nrog rau ntau qhov chaw ntawm 600-1700nm.

2. Qhov xaus

Pob zeb diamag zoo li cov duab tau npaj nrog argon ua ib qho kev pabcuam roj thiab los ntawm kev siv lub sijhawm ua haujlwm tsis zoo xws li tshuab tsis muaj plhom (magnetron sputtering). Tus cwj pwm ntawm kev tso dej siab tso rau ntawm microstructure thiab cov khoom siv dag zog ntawm DLC cov duab tau kawm:

(1) DLC film thickness tsub kom nrog rau qhov nce ntawm kev tso dej siab.

(2) XPS kev xeem tau qhia tias thaum lub siab ntsaws dej nce siab ntxiv los ntawm 0.18 rau 1.50Pa, cov ntsiab lus ntawm sp3 hybrid bond hauv DLC zaj duab xis txo nrog qhov nce ntawm kev tso dej siab. Tus cwj pwm thim rau ntawm cov ntsiab lus ntawm sp3 hybrid daim ntawv cog lus hauv DLC zaj duab xis tau piav qhia los ntawm "ntiav txhaj qauv".

(3) nano-indentation kev ntsuam xyuas tau pom tias thaum lub siab ntsws nce siab ntawm 0.18Pa mus rau 1.50Pa, nano-hardness thiab elastic rov qab ntawm DLC zaj duab xis yuav txo nrog qhov nce ntawm kev tso dej siab.

(4) ellipsometry xeem tau qhia tias, nyob rau tib qhov kev ntsuas wavelength, qhov qis qis dua ntawm DLC zaj duab xis tsawg zuj zus nrog qhov nce ntawm kev tso dej siab, uas yog cuam tshuam rau zaj duab xis qhov ceev thiab sp3 hybrid bond cov ntsiab lus.

IKS PVD, nruab nrab zaus magnetron tshuab ua kom tshuab, hu rau peb tam sim no, iks.pvd @ foxmai.com