Txoj kev tshawb ntawm Uniformity ntawm TiN Deposited rau Stainless hlau phaj los ntawm Multi-arc Ion Plating

Kawm ntawm lub uniformity ntawm TiN tso ntawm stainless hlau phaj los ntawm multi-arc ion plating

Multi-arc ion plating yog txheej txheej tsim zoo rau cov hluav taws xob, uas yuav siv tau los npaj cov hlau duab, cov yeeb yaj kiab hlau, cov yeeb yaj kiab thiab cov yeeb yaj kiab uas muaj ntau hom duab. Vim nws cov hlau siab ionization siab thiab siab ion zog, qhov kev siv tshuab no tuaj yeem txhim kho qhov tsis muaj txheej txheem thiab adhesion, thiab tau ua lub tshuab zoo tshaj plaws rau kev tso dej ntawm TiN hniav zaj duab xis.

Ntau cov pob zeb hauv plhaub TiN, cov essence uas yog nkag tau rau hauv cov txheej txheem ntawm cov tswv yim feem ntau ntawm cov tshuaj txheej txheem, uas nyob rau tib lub sij hawm ntawm evaporation ntawm titanium ntshuam tuaj yeem nrog titanium nitrogen, nrog cov evaporation ntawm titanium tov ua kua, nyob rau hauv qis kub yog biochemistry ras txog, sediments tsim nyob rau hauv lub substrate sib txuas.

Txawm hais tias multi-arc ion plating muaj zoo diffraction cov cuab yeej thiab yuav siv tau rau txhua hom ntawm decorations, nws yuav tsis yooj yim kom tau txais TiN txheej nyob rau cheeb tsam loj ntawm stainless hlau substrate rau architectural dai kom zoo nkauj.

1. Qhia cov teeb meem

Txhawm rau kom tau zoo txaus nkaus, qhov transverse dav ntawm lub phiaj xwm yuav tsum tau loj dua lub dav ntawm lub substrate, thiab lub hom phiaj yog ib qho tas mus li nyob rau hauv dav kev taw qhia ntawm lub substrate. Thiab ntau yam arc ion khoom txhua arc yog tsis ua mus ntxiv rau ntawm qhov chaw nruab nrab ntawm arc thiab arc muaj qee yam nrug, yog tias kev kho tsis zoo kho qhov muag khoom, los yog kev xaiv tsis txheej txheem ntawm cov cuab yeej software, nws yog qhov ua tau kom lub substrate nyob rau hauv lub qhov txawv ntawm lub nraub qaum thiab ib qho loj ntawm cov xim sib txawv ntawm arc thiab arc, arc yog txawv qhov sib sib zog nqus ntawm qhov xim (lossis lub teeb), nruab nrab ntawm kem thiab kos duab xim ntiav los yog tob, curving stripes qhov tob, feem ntau hu ua "Xiav zeb", ua cov khoom ntawm tus hniav poob, txawm ua puas.

Qhov teeb meem ntawm uniformity ntawm ion-plated stainless hlau daim hlau yog sib tham nyob rau hauv daim ntawv no

2. Cuam tshuam yam tseem ceeb ntawm kev kho vajtse

2.1 qhov kev ncua deb ntawm cov kaus poom thiab cov substrates

Qhov kev ncua deb ntawm arc thiab cov substrate muaj feem xyuam zoo rau lub uniformity ntawm ion plating txheej. Lub nraub qaum arc pib nrug me me heev, tus naj npawb ntawm cov khoom sib tsoo ua ntej yuav ncav lub substrate tsawg dhau, cov nyhuv tawg yog tsis muaj zog, thiab cov txheej coating tsis zoo. Arc pib nrug yog loj heev, tsis yog tsuas yog pov tseg ntawm qhov chaw, nce qhov tsis muaj zog lub sij hawm, tab sis kuj ua rau cov khoom ncav cuag lub substrate thaum lub zog tsawg heev, txheej ruaj thiab poob. Theoretical and experimental results qhia tau tias qhov xim film uniformity yuav tsum tiav thaum lub arc pib deb tshaj 200 hli.

2.2   magnetic field zog

Sib zog sib zog ua kom muaj zog thiab qhov sib npaug ntawm kev sib raug zoo zoo, nws paub zoo tias lub sib nqus teb nyob rau hauv qhov chaw nruab nrab muaj peev xwm txhim kho qhov kev ua tau zoo ntawm cov hluav taws xob kev siv fais fab, ua rau cov kev mob plab accelerated arc, nce cov cathode emission electrons thiab ions , ua kom qhov ntom ntom nti thiab cov kev taw qhia, txo cov ntsiab lus ntawm cov kua dej, tab sis lub zog ntawm cov hlau nplaum sib txuas mus rau ib qho, ntau ntau yuav ua rau cov ntsiab lus, qhov tsis sib haum ntawm txheej poob; Tias tsis muaj zog thiab yooj yim ua rau arc extinguishing, tsis tuaj yeem mus txog lub luag hauj lwm ntawm qhov ruaj khov kho.

Kev ntsuam xyuas pom tias qhov siab tshaj plaws ntawm txoj hauv kev los ntawm cov khoom siv ntawm qhov chaw ntawm magnetic field lub zog nyob rau hauv 20 ~ 35 gs yog qhov zoo tshaj plaws, ua ntej siv tag nrho cov khoom siv arc nyob rau ntawm lub magnetic teb lub zog yuav tsum tau siv cov gauss meter unified, raws li kev siv khoom noj khoom haus, qhov chaw ntawm cov khoom siv ntim ntawm qhov sib txawv ntawm cov hlau nplaum me thiab ua rau lub dag zog ntawm qhov chaw ua kom muaj zog ntxiv, yog li tsimnyog yuav kho nws lub sijhawm raws li qhov chaw ntawm cov khoom siv ntawm qhov chaw ntawm cov hlau nplaum khov, qhov chaw nto moo ntawm lub cev tsis muaj teeb meem loj ntawm cov khoom yuav tsum tau muab tso ua ke.

3. Software cuam tshuam

3.1 roj siab

Nyob rau hauv tus txheej txheem ntawm ion plating, cov roj siab muaj ib tug zoo cawv rau uniformity ntawm txheej. Feem ntau hais lus, qhov siab zog qhov siab, qhov zoo dua qhov ion diffraction yog thiab qhov zoo dua qhov uniformity ntawm cov txheej no. Txawm li cas los xij, ntau lub siab kuj yuav txo qhov lub zog uas tau ua los ntawm cov khoom thaum lawv ncav cuag lub substrate thiab cuam tshuam lub zog ntawm qhov txheej txheem. Kev sim tau pom tias qhov zoo ntawm ib nrab siab ntawm nitrogen yog 3.0 * 10-1 ~ 1Pa rau lub tso rau ntawm TiN rau thaj tsam loj ntawm stainless hlau substrate los ntawm ion plating.

3.2 substrate siab

Hauv qhov chaw qhov tsis zoo substrate yuav zoo dua qhov kev ceev ntawm qhov xwm txheej, substrate kom tau txais lub zog loj dua, ua li no ua rau lub zog ntawm txheej thiab cov substrate, tab sis ntau qhov kev tsis txaus siab yuav ua rau cov cua tawg kom pom zoo rau qhov substrate, uniformity ntawm txheej, ion plating deposition ntawm TiN film bias ntawm 50 ~ 100 v yog zoo dua.

3.3 qhov siab tshaj plaws ntawm qhov tam sim no

Lub caij tam sim no qhia txog kev hloov evaporation ntawm tus yeeb yam. Cov kev ntsuam xyuas pom tau tias thaum lub caij tam sim no nce thaum lub tsho tsis haum yuav poob, qhov no yog vim tawg ntawm cov khoom tso rau hauv lub substrate, thiab deposition hauv txojkev vim muaj cov xwm txheej ntxiv ntawm arc qhov chaw, txawm li ntawd los, los ntawm kev txhim kho cov khoom ua tau zoo, cia siab tias ntau dua qhov zoo tshaj plaws, qhov no yuav tsum tau ua kom peb txiav txim siab, ntxiv rau qhov khoom siv ntawm qhov sib txawv ntawm qhov sib txawv, qhov kev xaiv ntawm cov tsis yuav txawv, rau qhov khoom siv ntawm ib txoj kab uas muaj 65 mm arc, arc current nyob ntawm 50 ~ 100 a.

3.4 substrate kub

Sab nraud ntawm qhov kev txav ntawm ion plating txheej uniformity, lub ntsiab yog tshem tawm cov qhov nqus ntawm sab hauv tsev thiab txhim kho txheej nplaum, qhov hluav taws xob sab hauv tsev yog qhov tsim nyog hauv lub tsho nees ntawm ib qho tseem ceeb vim, tshwj xeeb tshaj yog rau cov khaubncaws sab nraud povtseg nrog cov khoom siv dej txias, Lub caij ntuj sov huab cua vaum yog qhov loj dua, nyob hauv lub qhov nqus cua ntawm lub qhov dej nqus cua txias yooj yim, qhov no yog qhov ua rau dej loj, ntxiv rau, tom qab ntxuav cov substrate drying tsis tag yuav tuaj yeem coj mus rau hauv lub qhov nqus tsev, dej rhuab mus rau chav, ib qho yooj yim ua rau paug ntawm substrate hauv lub tshuab nqus tsev sab hauv, Burns substrate nto (ntawm qhov tod tes, hauv qhov kev txiav txim ntawm cov hluav taws xob fais, decompose cov pa, nitrogen thiab oxygen hnov mob titanium sai, nws yuav ua rau qhov kev hloov ntawm qhov txheej txheem txheej, ua rau cov xim xim tsis sib txig, lub qhov kub tob hau yuav tsum yog ntawm 120 ℃ ~ 200 ℃ , vim kub kub dhau lawm ua di tsis yooj yim rau kev thauj khoom thiab tshem tawm cov substrate, txo cov kev ua kom zoo, rau lwm qhov, thaum kev puas tsuaj rau lub tshuab nqus tsev nqus ntawm cov dej txias thiab cia rau hauv tsev kub, qhov nqus tau zoo heev hauv lub xeev tau zoo dua.

4, kawg

Thiaj li yuav tau txais kev nplua zoo zoo nkauj N, kho kho ntawm qhov khoom kho qhov muag thiab cov txheej txheem lwm yam tsis zoo ntawm cov khoom software yog ib qho tseem ceeb, rau kev sib txawv ntawm cov cuab yeej siv, ntau yam yuav tsum tau ua rau hauv tus account comprehensively, unified cov cai ntawm ntau cov txheej txheem, nrhiav qhov sib thooj mus rau qhov zoo ntawm cov txheej txheem ntawm cov khoom siv.

Tsis tas li xwb, qhov haujlwm ua ntej ua ntej plating tu thiab ua kom pwm roj purity ntawm lub txheej tsho kuj muaj kev cuam tshuam ntau, vim tias ob qhov no feem ntau ua rau kom txaus siab, thiab tau txais kev zoo tu (siv ultrasonic tu khoom) thiab nitrogen purity kuj yog yooj yim, tsis yog nyob rau hauv cov uas muaj ntawm daim ntawv no.

Thaum kawg, tus txheej txheem tsis raug ntawm TiN txheej tso ntawm 3000mm * 1000 hli stainless hlau phaj los ntawm ntau cov khoom siv rau sab nraud 1500mm thiab ntev ntawm 3500mm thiab 24 arc qhov chaw muab rau kev sib tham los ntawm cov neeg ua haujlwm nrog.

IKS PVD , Ntau Arc ion Megnetron sputtering txheej kaw, hu rau: iks.pvd@foxmail.com