Qhov loj Parameters uas cuam tshuam Cov Sputtering
Jun 09, 2018| 1. Txiav Txim Sib Thoob
Qhov qis tshaj plaws ntawm qhov teeb meem ntawm qhov teeb meem ions uas yuav tsum tau mus rau qhov kev tshem tawm lub hom phiaj tsis muaj feem xyuam nrog hom kev tshwm sim ions tab sis ntsig txog lub hom phiaj. Tom qab lub zog ntau tshaj li qhov chaw txawb, cov qaug tshuaj yeem yog proportional rau lub xwmfab ntawm lub zog ntawm ion ua ntej 150 lub tsev raws li ion zog nce, thiab cov paib yields yog proportional to ion zog ntawm qhov ntau ntawm 150 lub tsev rau 1 txoj kev. Nyob rau hauv qhov ntau ntawm 1kev ~ 10kev, qhov kev ywj pheej ua rau me ntsis hloov. Thaum lub zog tau nce lawm, qhov qaug tshuaj qaug cawv tau pom muaj qis dua. Cov nram qab no yog qhov chaw pib ntawm ntau cov hlau uas tau cuam tshuam nrog ntau qhov teeb meem ions.
| Hlau | Ion Sputtering threshod / eV | Sublimation Tshav Kub / eV | |||
| Tsis yog | Ar | Kr | Xe | ||
| Ti | 22 | 20 | 17 | 18 | 4.40 |
| Cr | 22 | 22 | 18 | 20 | 5.28 |
| Fe | 22 | 20 | 25 | 23 | 4.12 |
| Cu | 17 | 17 | 16 | 15 | 3.53 |
| Zr | 23 | 22 | 18 | 25 | 6.14 |
| Ag | 12 | 15 | 15 | 17 | 3.35 |
| Au | 20 | 20 | 20 | 18 | 3.20 |
2. Txiav Txim Siab
Sputtering yield hais txog qhov nruab nrab ntawm atoms ib qhov zoo ion uas tau tawm ntawm lub phiaj xwm thaum qhov teeb meem ions bombard lub phiaj. Cov feem sib txawv ntawm cov qauv muaj xws li cov hauv qab no:
◆ Cov qoob cog qoob loo ua rau pom muaj qee lub sij hawm nrog qhov kev hloov ntawm tus lej ntawm lub hom phiaj. Nrog rau qhov nce ntawm qhov hluav taws xob puv xim ntawm lub plhaub ntawm lub hom phom, cov qoob loo ua rau cov qoob loo loj tuaj (ntxig hloov nrawm).
◆ Teebmeem ntawm cov teebmeem ion rau ntawm cov pa tawm
Cov qoob cog qoob loos tau nce ua ntu zus nrog nce atomic ntau ntawm cov xwm txheej.
Cov kua qaub ncaug ntawm cov nyiaj, tooj liab, thiab tantalum uas sib thooj rau ntau yam teeb meem ions ntawm 45Kev.
◆ Teeb meem ntawm ion xwm txheej kaum sab xis rau cov paib yield
Rau tib lub hom phiaj thiab qhov teeb meem ions, cov qoob loo tawm ntau tuaj raws li qhov teeb meem ntawm qhov ion nce. Thaum lub kaum sab xis nce mus txog 70 ° ~ 80 °, cov qoob lwj phom yog qhov loj tshaj. Tseem yuav ua kom lub kaum sab xis ntawm qhov tshwm sim, qhov qaug tshuaj txi yog txo kom tsawg, thiab cov qoob lwj phom yog 0 ntawm 900 °.
◆ Teebmeem ntawm qhov kub thiab txias ntawm cov paib
Feem ntau, nyob rau hauv qhov kub thiab txias ntau qhov chaw uas tau txi cov pa tawm tuaj yeem tau hais txog kev sublimation zog, qhov qaug tshuaj yeem tawm los ntawm kev kub ntxhov. Yog tias qhov ntsuas kub zoo tshaj qhov no, cov qoob lwj ua rau qis qis yuav nce zuj zus.
