Uniform ntawm Sputtering Txheej

Mar 24, 2023|

Lub uniform ntawm sputtering txheej

Rau sputtering txheej: nws tuaj yeem nkag siab yooj yim raws li kev siv hluav taws xob lossis hluav taws xob laser foob pob hluav taws xob ntawm lub hom phiaj, thiab cov khoom saum npoo ntawm cov atomic pawg los yog ions raug sputtered, thiab thaum kawg tso rau saum npoo ntawm substrate, undergo cov txheej txheem tsim zaj duab xis, thiab thaum kawg tsim ib zaj duab xis. Sputtering txheej tuaj yeem muab faib ua ntau hom. Feem ntau hais lus, qhov sib txawv ntawm sputtering tus nqi thiab evaporation txheej yog tias sputtering tus nqi yuav dhau los ua ib qho ntawm qhov tseem ceeb. Nyob rau hauv lub laser sputtering txheej pld, cov khoom uniformity yog ib qho yooj yim los tswj, tab sis lub thickness uniformity ntawm atomic scale yog kuj tsis zoo (vim nws yog pulsed sputtering), thiab kev tswj ntawm siv lead ua kev loj hlob (sab nrauv) kuj yog feem ntau. Siv pld ua piv txwv, cov ntsiab lus tseem ceeb muaj xws li: lub lattice match degree ntawm lub hom phiaj cov khoom thiab substrate, txheej huab cua (tsis tshua muaj roj cua cua), substrate kub, laser zog, mem tes zaus, sputtering lub sij hawm. Rau cov khoom sib txawv sputtering thiab substrates, qhov tsis zoo tshaj plaws yuav tsum tau txiav txim siab los ntawm kev sim, uas txawv. Qhov zoo ntawm cov cuab yeej txheej feem ntau yog nyob ntawm seb nws puas tuaj yeem tswj tau qhov tseeb

qhov kub thiab txias, seb nws tuaj yeem ua kom lub tshuab nqus tsev zoo, seb nws tuaj yeem ua kom lub tshuab nqus tsev zoo huv si. MBE molecular beam txheej txheej thev naus laus zis tau daws cov teeb meem saum toj no, tab sis nws yog siv rau kev tshawb fawb sim. Kev sib xyaw txheej tshuab feem ntau siv hauv kev tsim khoom lag luam feem ntau yog raws li ion evaporation txheej thiab magnetron sputtering txheej.

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IKS PVD tuam txhab, kho kom zoo nkauj txheej tshuab, cuab yeej txheej tshuab, DLC txheej tshuab, kho qhov muag txheej tshuab, PVD nqus txheej kab, txoj haujlwm tig-key yog muaj. Hu rau peb tam sim no, E-mail: iks.pvd@foxmail.com

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