TiCN Txheej Raws Li Los Nqus Arc Ion Plating
Jan 09, 2018| Npaj cov txheej txheem ntawm TiCN txheej
Txij li thaum xyoo 1985, Tom qab Knotke luam tawm thawj qhov kev tshawb fawb ntawm TiCN txheej tshuab, Cov neeg qhia zoo heev rau nws qhov kev siab txias oxidation ua haujlwm thiab kev ua haujlwm zoo, thiab kom deb li deb tau tsim ntau yam ntawm lub cev siv tshuab vapordeposition. Tam sim no, nws muaj peb txoj kev npaj ntawm TiCN txheej, uas yog magnetron plutter ion plating txoj kev, radiofrequency sputtering txoj kev thiab multi-arc ion plating txoj kev, nyob rau hauv uas magnetron plutter ion plating txoj kev thiab multi-arc ion plating txoj kev yog feem ntau ploj siv thiab luv nqi.
Magnetron plutter ion plating.
Magnetron txuj kev siv txujci lug tsim rua xyoo 1970s, kws ua rua kev siv technology hab kev tshawb nrhav, nwg tau lug siv nyob huv industrialization ntawm hluav taws xob, qhov muag fais fab hab lub zog, cov khoom siv hab lwm yaam hab lwm yaam hab ua ib qho kws siv lug ntawm TiCN zaj duab xis txoj kev. Hauv kev txheej txheem, Ti ions yog tsim los ntawm kev siv Ar ions los ntawm Ar roj ua paug tawm mus rau lub hom phiaj ntawm Ti, thiab cov electrostatic acceleration yawg mus ua hauj lwm daim thiab yog li cov zaj duab xis deposition. Txoj kev no muaj kev tso dej siab siab, cov xim ua kom tsis sib haum, thiab cov ion plating yuav ua kom qhov kev sib txuas ntawm cov txheej thiab cov duab kos thiab ua rau lub koom haum saib xyuas kev ua yeeb yam. Nyob rau tib lub sijhawm, lub hom phaj yuav ua kom muaj kuab paug, thiab qis dua qhov txheej txheem ntawm cov txheej txheem txheej txheem yog qhov nws tsis muaj zog. Nws tau pom, thaum carbon thiab nitrogen ib nrab siab nce, cov nqi dej yuav qeeb.
Ntau-Arc ion plating.
Ntau-Arc ion plating belongs rau ib qho kev txhim kho ion plating txoj kev, thawj tsim los ntawm Soviets, nyob rau hauv thaum ntxov 1980s, thawj zaug los ntawm US Multi-Arc. Lub hauv paus ntsiab lus yog siv lub phiaj xwm hlau raws li lub cathode, tawm ntawm cov kab ntawm anode plhaub thiab ua lub hom phiaj evaporation thiab ionization, ua qhov chaw plasma, thiab ces tso txheej rau ntawm daim ntawv ua haujlwm. Piv rau lwm cov kev siv phom, qhov kom zoo dua yog tias cov cathode ua cov ntshav tawm ncaj qha, thiab cathode lub phiaj yuav raug npaj txheej txheem, uas ua kom yooj yim rau simplig hom qauv. Tsis tas li ntawd, qhov sib txuam feem ntau ntawm lub cev muaj zog, siab npaum li cas, siab npaum li 60% ~ 80%, qhov ntom ntawm daim nyias nyias muaj zog, lub zog thiab cov kav ntev yog qhov zoo, qhov nruab nrab ntawm zaj duab xis thiab duab matrix yog yooj yim los tsim atomic diffusion thiab zaj duab xis adhesion yog qhov zoo.
Txhuam cov txheej txheem arc ion plating txheej txheem siv ntshav siab electromagnetic rau lim, uas tuaj yeem los txo lossis tshem tawm loj loj. Piv nrog cov pa cocion plating txheej, arc-type filtered arc txheej macro-particle yog tsis muaj impurities, homogeneous, ntom qauv, thiab muaj peev xwm ua tau raws li cov kev txwv ntawm cov optics, microelectronics zaj duab xis. Tseem muaj qee qhov kev tsis zoo rau cov khoom siv ntxaij lim dej, uas yog, cov kab ntsig yog tsawg, feem ntau tsawg dua 200nm, thiab nyuaj rau cov duab kos ntau ntau, ua rau cov khoom loj loj tsis tuaj yeem ua tiav, thiab kev sib kis efficiency tsis siab, qhov siab tshaj plaws ntawm kev sib kis ntawm cov qauv khoov qis li ntawm 30%, qhov ion tam sim no xwb 2% rau 3% ntawm lub caij tam sim no.
Qhov cuam tshuam ntawm cov roj ntws ntawm cov txheej txheem
Kev hloov ntawm N 2 qhov siab (ndlwg) yuav ua rau muaj nitrogen ion density thiab hloov lub zog, cuam tshuam nrog kev sib txuas nrog cov atom atom, ua qhov hloov kev hloov ntawm kev nyiam, yog li cuam tshuam lub txheej txheej. Reserachers pom tau hais tias nyob rau hauv qhov kev kub nyhiab tag nrho 0.8Pa thiab Ar ntws 20sccm, thaum nitrogen ntws tsawg dua 6sccm dua orientation yog (111), thaum nitrogen khiav siab tshaj 6sccm, (111) ncov siab, thiab (200 (111) lub dav hlau ntws zog tsawg, nyob hauv cov tsev qis qis qis tsawg yog tsiv mus rau (111) dav hlau, nrog rau kev nce ntawm nitrogen khiav, cov nqi ntawm atomic migration decreases, tab sis (200) siv deg tob hau muaj qhov siab zog, thiab qhov deb ntawm qhov sib txawv deb ntawm cov qauv qis qis qis luv luv, tau txais txiaj ntsim ntawm kev siv lead ua tau raws li ntawm (200) siv lead ua av. Reserachers pom tias thaum nitrogen ntws 1sccm, cov qauv tau txais amorphous qauv, thaum cov nitrogen khiav ntau dua 2sccm, muaj cov ncej txheem columnar hauv cov yeeb yaj kiab, cov ciam ciam uas muaj, thaum nitrogen ntws nce mus rau 6sccm, zaj duab xis ua tuab, thiab feem ntau yog xaiv ua rau lub microstructure ntawm cov isotropic thiab cov kev txhim khu kev lis piam, feem ntau raws li kev nce ntawm nitrogen khiav, tus nqi piv txwv atomic txo txo, membrane deg qhov hloov ntawm cov tshuaj hauv zos. Cov neeg soj ntsuam pom tau tias muaj nitrogen khiav zuj zus tuaj, cov nplej tau sau rau hauv zaj duab xis tsawg dua, qhov ziab ua ntsej muag thiab du, qhov roughness decreases maj mam mus txog.
Tam sim no cov pa roj carbon monoxide yog siv los ntawm cov neeg soj ntsuam ntawm TiCN yog cov C 2 H 2 los yog CH 4 roj, vim TiN thiab TiC yog NaCl-hom ntsej muag lub ntsej muag, lub vojvoog ntawm N thiab atom C yog qhov ze, N 0.071nm, C yog 0.077nm, qhov ob tuaj yeem hloov tau los tsim ib cov ntaub ntawv TiC (N) los yog TiN (C). Nyob rau hauv qee qhov kev mob, tej zaum yuav muaj ob-theem qauv tshwm. Nyob hauv XRD diffraction spectrum lub peaks ntawm lawv yog cov zoo heev, thiab txawm tias ib co sib tshooj, uas ua rau lub sijhawm tsis yooj yim complexity, yog li nws tau sau ua TiCxN1-x.
Cuam tshuam txog TiCN txheej txheem
Kub
Qhov zoo ntawm TiCN txheej yog tsuas yog cuam tshuam los ntawm cov txheej txheem muaj xws li cov muaj pes tsawg leeg, qhov kub thiab txias. Matrix kub txawv yuav ua rau lub txheej loj ntawm cov qoob loj, cov duab, cov qauv yog txawv txav. Lub thev dej kub siab dhau heev thiab cov dej khov heev dhau lawm yuav ua rau pom qhov siv lead ua los ntawm ceg ntoo, uas muaj feem xyuam rau qhov zoo ntawm cov txheej; qhov tso dej kub kub tsis txaus, nws nyhav rau cov dej ntim, txeem tawm, cuam tshuam rau lub hwj chim ntawm lub qhov thiab txheej txheem. Yog li, qhov tsim nyog ntawm qhov kub thiab txias yog ib qho tsim nyog uas yuav tau txais cov txheej txheem zoo. Mc.Cormell etc. tso TiCN txheej ntawm cov hlau tsis muaj fade nrog PVD txoj kev, xws li nws qhov kev mob siab, daim ntawv cog lus zog thiab coefficient ntawm kev sib txhuam yuav tsis hloov thaum ntsuas kub tsawg tshaj 250 ℃. Tom qab 450 ℃ kev ntsuas kub rau kev kuaj, TiCN txheej coefficient coefficient yog 0.2 ua ntej 250 ℃, thiab muaj txog li ntawm 250 ntawm 250 ℃, tab sis tseem qis tshaj qhov kev sib txhuam coefficient ntawm TiN, vim tias hauv TiCN txheej C tau ua lub roj rau lub luag hauj lwm. Cov kev tshawb fawb pom tias thaum kub npaum li 200 tawm C, cov coefficient ntawm kev sib txhuam thiab hnav npaum li cas ntawm TiCN lo nrog nce zuj zus.
Pulsed siab
Lub neej ntawm kev ua thuam kev ua haujlwm plays lub luag haujlwm tseem ceeb los txo qhov kev poob qab thiab ua kom zoo dua qub. Tsis zoo siab tuaj yeem tsim kom muaj tus nplua nuj ua haujlwm rau lub cev ua rau lub titanium ions nyob ze ntawm lub hom phiaj cathre yoojyim, ua kom muaj kev sib tsoo nrog nitrogen hauv plasma thiab cov dej, thiab tib lub sij hawm nce lub zog ntawm cov titanium thiab nitrogen. Yog tias tswj lub tshuab nqus tsev tsis tu ncua, cov dej nitrogen nce nrog kev tsis zoo dua, tab sis cov ntsiab lus nitrogen hauv zaj duab xis tsawg zuj zus tuaj nrog kev tsis zoo. Qhov no yog qhov peev xwm ntawm Ti-Ti qhov muaj peev xwm muaj zog tshaj Ti-N, thiab nrog kev nce tsis zoo, qhov rov ua kom muaj peev xwm ntawm titanium muaj zog tshaj nitrogen. Tsis tas li ntawd, nrog kev nce ntawm kev ua kom cov ntshav tau ua lub zog ua ywj rau qhov hloov hauv kev hloov, cuam tshuam rau cov koom haum ntawm cov yeeb yaj kiab.
Arc tam sim no
Pom zoo los ntawm kev xav ntawm industrial ntau daim ntawv thov, nce arc tam sim no yuav ua tau kom cov khoom tsim tau thiab zaj duab xis hardness thiab hnav tsis kam. Nce zauv ziag tam sim no, txhais tau hais tias lub hom phiaj zuag qhia tag nrho, qhov sib txawv ntawm lub cev yuav nce, thiab lub luaj li cas yuav nce ntxiv.
Kev ua rau kom mob me me thiab qhov tob hauv qhov tob yuav ua rau tsis tuaj yeem ua rau cov neeg tsis muaj zog, qhov tshwj xeeb tshaj yog qhov loj, muaj li 1/3 faus hauv zaj duab xis hauv qhov siab thiab qhov me me qhov hauv qab. Thaum muaj kev kub ntxhov xws li cov kua qaub thiab cov alkali thiab lwm yam, qhov no yog thawj qhov siab tsis zoo thiab zoo li daim tawv nqaij, vim li ntawd, lawv lub neej yog qhov tseem ceeb vim tias qhov txhuam ntawm qhov txheej txheem. Yog li, hauv daim ntawv thov, rau qhov kev sib haum xeeb ntawm kev sib ceg arc tam sim no thiab kev xa me ntsis, qee txoj kev ua haujlwm zoo siv, xws li nce qhov evaporation thaj tsam ntawm lub hom phiaj, ntxiv dag zog ntawm cov cua txias ntawm lub hom phiaj lossis tsim tshiab arc qhov twg inhibit nco ua mob.
