Txoj Kev Siv PVD Uas Siv?
Dec 29, 2017| Qhov feem ntau hom ntawm lub cev vapor deposition (PVD) yog magnetron sputtering thiab evaporation, uas yuav yog thermal los yog electron nqaj (e-nqaj). Koj yuav txiav txim siab thaum twg thaum twg?
MAGNETRON SPUTTERING DAB TSI?
Sputter deposition yog zoo heev rau cov ntaub ntawv uas muaj siab tshaj cov ntsiab lus tseem ceeb uas tsis tuaj yeem evaporated. Magnetron sputtering yog txoj kev ua ntau yam los tsim cov yeeb yaj kiab heev nrog kev nplua zoo. Magnetron pluttering yog ib qho ntshav raws txheej txheem uas ua rau muaj lub plhom haum txav ntawm cov phiaj xwm. Tom qab ntawd, cov lus npluas nuj ntawm cov ntshav tau tsiv tawm nrog cov khoom siv nyiaj tsis zoo thiab qhov atoms los ntawm lub phiaj xwm los yog "ntxaum", uas tom qab ntawd tso rau ntawm ib lub substrate los yog wafer.
VIM LI CAS SIV COV MAGNETRON SPUTTERING SIV:
● Kev zoo heev ntawm cov xim tha xim, thiab cov yeeb yaj kiab ntawm cov yeeb yaj kiab - ua kom denser coatings tshaj evaporation
● Zoo meej rau cov xim hlau los yog cov nplais uas muaj cov khoom siv kho qhov muag lossis hluav taws xob
● Teem nrog ntau qhov chaw magnetron
DAB TSI YOG DAB TSI TSHWM SIM YOG DAB TSI?
Resistive thermal evaporation yog kab lus yooj yim ntawm PVD. Nws nquag siv ib qho chaw tiv taus cua sov kom qhuav tau cov khoom siv nyob rau hauv ib chav. Cov khoom evaporated nce nyob rau hauv lub Chamber ntawm thermal zog, kawg txheej ib substrate nrog ib tug nyias movie. Cov txheej txheem no siv tau rau hlau los yog cov khoom vaj khoom tsev thiab yog qhov kev xaiv zoo rau kev tiv tauj hluav taws xob.
VIM LI CAS SIV LI CAS THIAJ TSIS TXAUS SIAB:
● Them nyiaj zoo tshaj los tsim cov yeeb yaj kiab nyias cov hlau los yog cov khoom siv hlau nrog cov kua kub dua
● Siv tau rau hauv qhov dej khov ua kom indium siv los ua wafer tsevneeg
● Cov nqi dej ntau dua li ntau dua
DAB TSI YOG DAB TSI YOG DAB TSI?
E-beam evaporation yog ib txheej txheem thermal evaporation uas tso cai rau kev xa ncaj qha mus rau ntawm cov khoom siv loj dua rau qhov khoom siv tau tshaj li qhov ua tau nrog thermal evaporation. Qhov no tso cai rau cov khoom pov tseg ntawm cov ntaub ntawv uas muaj huab cua melting, xws li kub. Nyob rau hauv txoj kev no, cov khoom siv evaporation yog muab tso rau hauv ob qho tib si los yog ib lub dej-txias tooj liab hearth, qhov twg nws yog ces rhuab los ntawm ib tug electron beam. Lub tshav kub ua rau evaporation ntawm qhov khoom siv, uas ces tso rau hauv substrate.
VIM LI CAS THIAJ TAM SIM NO:
Ua haujlwm rau ntau yam ntaub ntawv, nrog rau cov neeg uas muaj siab tshaj cov ntsiab lus uas tsis tuaj yeem siv thermal evaporation
● Muab cov kauj ruam zoo dua zoo dua li cov thawb ntim pa tshuaj (chemical vapor deposition) los yog tshuaj lom dej tshuaj (CVD)
● Muab cov khoom siv zoo dua qub thiab cov nqi dej ntau dua li ntau dua
● Tau txais kev pab los ntawm kev pab thib ob, uas tso cai rau kev kho mob ua ntej los yog ion pabcuam (IAD)
Nws tsis muaj ib txoj hauv kev uas yog txoj cai xaiv rau txhua daim ntawv thov. Tag nrho peb hom PVD muab lawv cov kev pab thiab yuav tsum raug xaiv raws li koj cov kev cai.
