Kev Ntsuas Phoo Ntu
D07-7KM Kev Sib Ntsuam Ntawm Qhov Ncauj Lus Cuam Tshuam Cov Kab Ntsuas Ncauj (MFC) muaj peb qho yooj yim xws li: khiav ceev, ntim kab khiav nkaum thiab cov ntawv luam tawm, nws yog ntsuas cov dej ntws hnyav txaus siab ua rau cov dej siab hloov mus vim muaj kev kub hloov. Tus MFC tau siv rau hauv thaj teb ...
- Khoom Taw qhia
Taw qhia
Kev ntsuas huab cua (MFC) muaj peb qho yooj yim xws li: khiav ceev, ntim kab khiav nrawm bypass thiab luam ntawv, nws yog ntsuas cov txheej txheem hnyav npaum li cas ua rau cov cua siab hloov tau los ntawm cov kev hloov kub. Cov MFC tau siv rau hauv cov tswv yim ntawm semiconductor thiab IC fabrication, cov ntaub ntawv tshwj xeeb kev lag luam, tshuaj lom neeg kev lag luam, kev lag luam hauv kev lag luam, kev lag luam kws tshuaj, kev tiv thaiv ib puag ncig, kev tshawb fawb qhov nqus dej, thiab lwm yam.
Hom Ntawv Thov
Cov kev hloov ntawm MFC muaj xws li cov khoom siv li microelectronic xws li diffusion, oxidation, epitaxy, CVD, plasma, etching, sputtering, ion implantation thiab lwm yam kev lag luam xws li cov khoom ntim khoom nqus, optical fiber yaj, khoom siv tshuaj micro, , cov cuab yeej hluav taws xob tswj qhov system, roj chromatograph thiab lwm yam kev ntsuas analytical.
D07-7KM MFC muaj qhov zoo tshaj plaws ntawm kev ua haujlwm siab, kev ua haujlwm ntev, kev ua zoo tshaj, kev ua haujlwm ceev, muag muag, kev muaj txiaj ntsim, kev lag luam dav dav (kev lag luam hauv kev kub siab los yog lub tshuab nqus tsev), yooj yim thiab yooj yim khiav lag luam, thiab lwm yam. Nws yuav tsum ntsia txhua qhov chaw uas tsim nyog thiab txuas nrog lub koos pis tawj kom paub tswj tsis tau.
Specification
Ntiv Nplhaib | (20,30,50,100,200,300,500) SCCM (0 ~ 1,2,3,5,10) SLM |
Qhov tseeb | ± 1.5% FS |
Tawm | ± 1% FS |
Repeatability | ± 0.2% FS |
Teb-Lub Sij Hawm | ≤ 4 sec |
Kub Coefficient | Zero: ≤ ± 0.1% FS / ℃; Tshaj: ≤ ± 0.2% FS / ℃ |
Max Siab | 3MPa |
Cov Kub Ua Haujlwm | 5 ℃ ~ 45 ℃ |
Sealing Khoom | Viton, Neoprene |
Qhov Chaw / Txuas Lus Tawm | 0V ~ + 5.00V (Tawm tswv yim rau kev> 100K, Tso Tawm Tsi Tam Sim No3) |
Fais fab mov | + 15V 50mA -15V 50mA |
Hluavtaws Hluav Taws Xob | D sub 15 pins Poj niam |
Txawv sib txawv | <0.01> |
Tshem Tus Nqi | 1 × 10-8atm • cc / sec Nws (1 × 10-9 Pa • m3 / sec Nws) |
Txheem Ob Leeg | Swagelok1, SwagelokΦ6, SwagelokΦ3, Swagelok1 / 8 ", φ4 (Inner) × 1 Hose Coupler, VCR1 / 4", Swagelok1 / 4 ", φ6 (Txuas) × 1 Hose Coupler |
Media | Tag nrho cov pa |
Emi | CE |
Nyhav | 0.92kg |
Nruab Nrab Dimension
