PECVD-Operating zaus ntawm RF fais fab mov
Jul 07, 2023| Rf PECVD feem ntau yog siv 50kHz ~ 13.56MHz zaus band RF fais fab mov, uas muaj zaus, muaj zog foob pob ua haujlwm ntawm ions hauv cov ntshav, ntau ntom ntom zaj duab xis, tab sis kev puas tsuaj rau substrate kuj tseem loj. Lub uniformity ntawm zaj duab xis nrog high zaus deposition yog ho zoo dua li ntawm qhov tsawg zaus, vim hais tias thaum lub zaus ntawm RF fais fab mov yog tsawg, hluav taws xob teb nyob ze ntawm ntug ntawm lub phaj yog tsis muaj zog, thiab deposition ceev yuav qis dua. tshaj qhov chaw nruab nrab ntawm lub phaj, thiab qhov sib txawv ntawm ntug thiab qhov chaw nruab nrab yuav me dua thaum qhov zaus siab.
IKS PVD tuam txhab, kho kom zoo nkauj txheej tshuab, cuab yeej txheej tshuab, DLC txheej tshuab, kho qhov muag txheej tshuab, PVD nqus txheej kab, txoj haujlwm tig-key yog muaj. Hu rau peb tam sim no, E-mail: iks.pvd@foxmail.com
